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• W1993419782 abstract "The development of insulating ceramic coatings is one of the most important subjects in fusion reactor liquid metal blanket R&D. Al2O3 and AlN are candidate materials for ceramic coatings because of their high electrical resistivity and high thermodynamic stability. In this study, Al2O3 and AlN coatings were fabricated by the RF sputtering method, and their properties were investigated. The prepared Al2O3 coatings seemed to be amorphous, and they had high electrical resistivity with high density comparable with the theoretical density. On the other hand, the prepared AlN coatings had remarkably low electrical resistivity because they presumably had non-stoichiometry (AlN1−x)." @default.
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• W1993419782 date "1998-07-01" @default.
• W1993419782 modified "2023-10-01" @default.
• W1993419782 title "Fabrication and properties of Al2O3 and AlN coatings for fusion reactor blanket by sputtering method" @default.
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• W1993419782 doi "https://doi.org/10.1016/s0257-8972(98)00486-1" @default.
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