Matches in SemOpenAlex for { <https://semopenalex.org/work/W1993462401> ?p ?o ?g. }
Showing items 1 to 99 of
99
with 100 items per page.
- W1993462401 endingPage "110" @default.
- W1993462401 startingPage "103" @default.
- W1993462401 abstract "The stresses in niobium films were studied and the following preliminary results were obtained. (1) Niobium films can be prepared in any stress state (tensile, stress free or compressive) by varying the argon sputtering pressure. (2) As the bias voltage increases, more argon is incorporated into the film; both Tc and R/R0 decrease; and the stress becomes more compressive and seems to saturate at about 1.5 × 1010 dyn cm−2 at higher bias voltages (at an argon sputtering pressure of 1.9 Pa). (3) The lattice parameters show a close relation to the film stresses. (4) Lowering the sputtering rate results in a higher argon content in the bias-sputtered films. (5) The as-deposited film surface is smoother when deposited at lower pressures; the film has a columnar structure and intercolumnar gaps at higher pressures. (6) The film prepared at a higher bias voltage has a smoother as-deposited surface and a much smaller column size. From this study of the behavior of the stresses in niobium films, it appears that the stress is determined mainly by the microstructure and the energetic particle bombardment. Energetic particle bombardment may promote compressive stress by the incorporation of argon, by the formation of a more dense microstructure and by a “shot-peening” action." @default.
- W1993462401 created "2016-06-24" @default.
- W1993462401 creator A5079185224 @default.
- W1993462401 date "1979-11-01" @default.
- W1993462401 modified "2023-09-25" @default.
- W1993462401 title "Intrinsic stress of magnetron-sputtered niobium films" @default.
- W1993462401 cites W1963728900 @default.
- W1993462401 cites W1976351724 @default.
- W1993462401 cites W2000015504 @default.
- W1993462401 cites W2010189152 @default.
- W1993462401 cites W2023022958 @default.
- W1993462401 cites W2025309083 @default.
- W1993462401 cites W2040179900 @default.
- W1993462401 cites W2057242677 @default.
- W1993462401 cites W2065517485 @default.
- W1993462401 cites W2087973209 @default.
- W1993462401 cites W2088670934 @default.
- W1993462401 cites W2180898129 @default.
- W1993462401 doi "https://doi.org/10.1016/0040-6090(79)90549-2" @default.
- W1993462401 hasPublicationYear "1979" @default.
- W1993462401 type Work @default.
- W1993462401 sameAs 1993462401 @default.
- W1993462401 citedByCount "110" @default.
- W1993462401 countsByYear W19934624012012 @default.
- W1993462401 countsByYear W19934624012013 @default.
- W1993462401 countsByYear W19934624012014 @default.
- W1993462401 countsByYear W19934624012015 @default.
- W1993462401 countsByYear W19934624012019 @default.
- W1993462401 countsByYear W19934624012020 @default.
- W1993462401 countsByYear W19934624012021 @default.
- W1993462401 countsByYear W19934624012022 @default.
- W1993462401 countsByYear W19934624012023 @default.
- W1993462401 crossrefType "journal-article" @default.
- W1993462401 hasAuthorship W1993462401A5079185224 @default.
- W1993462401 hasConcept C112950240 @default.
- W1993462401 hasConcept C113196181 @default.
- W1993462401 hasConcept C119599485 @default.
- W1993462401 hasConcept C127413603 @default.
- W1993462401 hasConcept C138885662 @default.
- W1993462401 hasConcept C159985019 @default.
- W1993462401 hasConcept C165801399 @default.
- W1993462401 hasConcept C171250308 @default.
- W1993462401 hasConcept C178790620 @default.
- W1993462401 hasConcept C185592680 @default.
- W1993462401 hasConcept C19067145 @default.
- W1993462401 hasConcept C191897082 @default.
- W1993462401 hasConcept C192562407 @default.
- W1993462401 hasConcept C20254490 @default.
- W1993462401 hasConcept C21036866 @default.
- W1993462401 hasConcept C22423302 @default.
- W1993462401 hasConcept C41895202 @default.
- W1993462401 hasConcept C43617362 @default.
- W1993462401 hasConcept C507968137 @default.
- W1993462401 hasConcept C547737533 @default.
- W1993462401 hasConcept C61427134 @default.
- W1993462401 hasConcept C87976508 @default.
- W1993462401 hasConceptScore W1993462401C112950240 @default.
- W1993462401 hasConceptScore W1993462401C113196181 @default.
- W1993462401 hasConceptScore W1993462401C119599485 @default.
- W1993462401 hasConceptScore W1993462401C127413603 @default.
- W1993462401 hasConceptScore W1993462401C138885662 @default.
- W1993462401 hasConceptScore W1993462401C159985019 @default.
- W1993462401 hasConceptScore W1993462401C165801399 @default.
- W1993462401 hasConceptScore W1993462401C171250308 @default.
- W1993462401 hasConceptScore W1993462401C178790620 @default.
- W1993462401 hasConceptScore W1993462401C185592680 @default.
- W1993462401 hasConceptScore W1993462401C19067145 @default.
- W1993462401 hasConceptScore W1993462401C191897082 @default.
- W1993462401 hasConceptScore W1993462401C192562407 @default.
- W1993462401 hasConceptScore W1993462401C20254490 @default.
- W1993462401 hasConceptScore W1993462401C21036866 @default.
- W1993462401 hasConceptScore W1993462401C22423302 @default.
- W1993462401 hasConceptScore W1993462401C41895202 @default.
- W1993462401 hasConceptScore W1993462401C43617362 @default.
- W1993462401 hasConceptScore W1993462401C507968137 @default.
- W1993462401 hasConceptScore W1993462401C547737533 @default.
- W1993462401 hasConceptScore W1993462401C61427134 @default.
- W1993462401 hasConceptScore W1993462401C87976508 @default.
- W1993462401 hasIssue "1" @default.
- W1993462401 hasLocation W19934624011 @default.
- W1993462401 hasOpenAccess W1993462401 @default.
- W1993462401 hasPrimaryLocation W19934624011 @default.
- W1993462401 hasRelatedWork W102531696 @default.
- W1993462401 hasRelatedWork W1968373997 @default.
- W1993462401 hasRelatedWork W1984391766 @default.
- W1993462401 hasRelatedWork W2019115850 @default.
- W1993462401 hasRelatedWork W2060921108 @default.
- W1993462401 hasRelatedWork W2089085266 @default.
- W1993462401 hasRelatedWork W2496350545 @default.
- W1993462401 hasRelatedWork W2795554382 @default.
- W1993462401 hasRelatedWork W3020822350 @default.
- W1993462401 hasRelatedWork W4240267549 @default.
- W1993462401 hasVolume "64" @default.
- W1993462401 isParatext "false" @default.
- W1993462401 isRetracted "false" @default.
- W1993462401 magId "1993462401" @default.
- W1993462401 workType "article" @default.