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- W1993552610 abstract "The performance of water- and solvent-cast, two-component photoresist films containing poly(2-isopropenyl-2-oxazoline) or poly(2-isopropenyl-2-oxazoline-co-styrene) with a photoacid generator has been investigated. These materials afford negative-tone images after deep-UV exposure and development in a suitable medium (water or toluene). Resist solutions prepared from polymers containing at least 80 mol % 2-isopropenyl-2-oxazoline may be cast from and developed in pure water. Features of higher quality can be obtained when the resist is cast from 2-methoxyethanol, probably because side reactions such as partial hydrolysis of the pendant oxazoline rings in aqueous environments are avoided. It was possible to resolve micrometer scale patterns using ca. 200 mJ/cm2 of irradiation at 254 nm, followed by heating 2 min at 130°C and development in water alone. Image quality and etch resistance were improved using copolymers containing up to 20 mol % of styrene repeat units. © 1999 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 37: 1225–1236, 1999" @default.
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- W1993552610 date "1999-05-01" @default.
- W1993552610 modified "2023-09-27" @default.
- W1993552610 title "Design of photoresists with reduced environmental impact. II. Water-soluble resists based on photocrosslinking of poly(2-isopropenyl-2-oxazoline)" @default.
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- W1993552610 doi "https://doi.org/10.1002/(sici)1099-0518(19990501)37:9<1225::aid-pola2>3.0.co;2-5" @default.
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