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- W1993629154 abstract "One:one alternating poly(p-trimethylgermylstyrene sulfone)s were obtained by tert- butylhydroperoxide initiated copolymerization of p-trimethylgermylstyrene with sulfur dioxide (SO2) at T < -60 degree(s)C. The molecular weight and polydispersity of the polysulfones were in the range of Mn equals 0.5 approximately 20 X 106 and Mw/Mn equals 1.8 approximately 5, respectively. The temperature of initial decomposition in nitrogen was 196 degree(s)C. Maximum UV absorption ((lambda) max) of the polysulfone was at 228 nm ((epsilon) max equals 16740 1/molcm of monomer unit). The polysulfone was found to be positive acting resists sensitive to x-ray ((lambda) c equals 18.5 angstrom) and electron beam." @default.
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- W1993629154 date "1992-06-01" @default.
- W1993629154 modified "2023-09-27" @default.
- W1993629154 title "Poly(p-trimethylgermylstyrene sulfone)s as a high-resolution electron-beam resist" @default.
- W1993629154 doi "https://doi.org/10.1117/12.59767" @default.
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