Matches in SemOpenAlex for { <https://semopenalex.org/work/W1993645992> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W1993645992 abstract "Abstract Experimental and theoretical studies are carried out to understand transport of nitrogen in aluminum during implantation process. 60 keV and 120 keV N2 + ion are implanted in pure Al substrates at doses ranging from l×l017 to 9×l017 N-atoms per cm2. RBS and Glancing angle XRD studies are carried out. RBS studies show that the depth profiles are gaussian in nature at low doses and gradually become rectangular in shape as the dose increases. XRD analysis reveals that AlN is formed even at low doses. Theoretical simulations of depth profiles at low dose, include displacement mixing and radiation enhanced diffusion, which are modelled to be described by a diffusion like process. Effective diffusion coefficient in radiation environment is found to be equal to 8×l0−16 cm2.sec−1. At high doses, when new N-atoms are added during implantation their transport gets linked with the already formed AlN. This leads to a rectangular shape of depth profiles observed at high doses." @default.
- W1993645992 created "2016-06-24" @default.
- W1993645992 creator A5000326908 @default.
- W1993645992 creator A5043035102 @default.
- W1993645992 creator A5054896351 @default.
- W1993645992 creator A5090027428 @default.
- W1993645992 creator A5059680938 @default.
- W1993645992 date "1995-03-01" @default.
- W1993645992 modified "2023-09-25" @default.
- W1993645992 title "Study of Nitrogen Implanted in Aluminum at Various Doses" @default.
- W1993645992 cites W1977325636 @default.
- W1993645992 cites W2029934075 @default.
- W1993645992 cites W2071168412 @default.
- W1993645992 cites W2084657630 @default.
- W1993645992 cites W2093505877 @default.
- W1993645992 cites W2107784923 @default.
- W1993645992 cites W2118411166 @default.
- W1993645992 cites W2129948147 @default.
- W1993645992 doi "https://doi.org/10.1080/10426919508935013" @default.
- W1993645992 hasPublicationYear "1995" @default.
- W1993645992 type Work @default.
- W1993645992 sameAs 1993645992 @default.
- W1993645992 citedByCount "5" @default.
- W1993645992 crossrefType "journal-article" @default.
- W1993645992 hasAuthorship W1993645992A5000326908 @default.
- W1993645992 hasAuthorship W1993645992A5043035102 @default.
- W1993645992 hasAuthorship W1993645992A5054896351 @default.
- W1993645992 hasAuthorship W1993645992A5059680938 @default.
- W1993645992 hasAuthorship W1993645992A5090027428 @default.
- W1993645992 hasConcept C111337013 @default.
- W1993645992 hasConcept C113196181 @default.
- W1993645992 hasConcept C120665830 @default.
- W1993645992 hasConcept C121332964 @default.
- W1993645992 hasConcept C138777275 @default.
- W1993645992 hasConcept C145148216 @default.
- W1993645992 hasConcept C153385146 @default.
- W1993645992 hasConcept C159985019 @default.
- W1993645992 hasConcept C178790620 @default.
- W1993645992 hasConcept C185544564 @default.
- W1993645992 hasConcept C185592680 @default.
- W1993645992 hasConcept C192562407 @default.
- W1993645992 hasConcept C41823505 @default.
- W1993645992 hasConcept C43617362 @default.
- W1993645992 hasConcept C513153333 @default.
- W1993645992 hasConcept C537208039 @default.
- W1993645992 hasConcept C62520636 @default.
- W1993645992 hasConcept C69357855 @default.
- W1993645992 hasConcept C97355855 @default.
- W1993645992 hasConceptScore W1993645992C111337013 @default.
- W1993645992 hasConceptScore W1993645992C113196181 @default.
- W1993645992 hasConceptScore W1993645992C120665830 @default.
- W1993645992 hasConceptScore W1993645992C121332964 @default.
- W1993645992 hasConceptScore W1993645992C138777275 @default.
- W1993645992 hasConceptScore W1993645992C145148216 @default.
- W1993645992 hasConceptScore W1993645992C153385146 @default.
- W1993645992 hasConceptScore W1993645992C159985019 @default.
- W1993645992 hasConceptScore W1993645992C178790620 @default.
- W1993645992 hasConceptScore W1993645992C185544564 @default.
- W1993645992 hasConceptScore W1993645992C185592680 @default.
- W1993645992 hasConceptScore W1993645992C192562407 @default.
- W1993645992 hasConceptScore W1993645992C41823505 @default.
- W1993645992 hasConceptScore W1993645992C43617362 @default.
- W1993645992 hasConceptScore W1993645992C513153333 @default.
- W1993645992 hasConceptScore W1993645992C537208039 @default.
- W1993645992 hasConceptScore W1993645992C62520636 @default.
- W1993645992 hasConceptScore W1993645992C69357855 @default.
- W1993645992 hasConceptScore W1993645992C97355855 @default.
- W1993645992 hasLocation W19936459921 @default.
- W1993645992 hasOpenAccess W1993645992 @default.
- W1993645992 hasPrimaryLocation W19936459921 @default.
- W1993645992 hasRelatedWork W1967031736 @default.
- W1993645992 hasRelatedWork W1982901520 @default.
- W1993645992 hasRelatedWork W1988422778 @default.
- W1993645992 hasRelatedWork W2006508929 @default.
- W1993645992 hasRelatedWork W2013952381 @default.
- W1993645992 hasRelatedWork W2018042939 @default.
- W1993645992 hasRelatedWork W2024322956 @default.
- W1993645992 hasRelatedWork W2056486473 @default.
- W1993645992 hasRelatedWork W2059447249 @default.
- W1993645992 hasRelatedWork W2061165125 @default.
- W1993645992 hasRelatedWork W2063726854 @default.
- W1993645992 hasRelatedWork W2067621957 @default.
- W1993645992 hasRelatedWork W2078300896 @default.
- W1993645992 hasRelatedWork W2087674068 @default.
- W1993645992 hasRelatedWork W2111033503 @default.
- W1993645992 hasRelatedWork W2171774581 @default.
- W1993645992 hasRelatedWork W2330617535 @default.
- W1993645992 hasRelatedWork W6387818 @default.
- W1993645992 hasRelatedWork W2140292152 @default.
- W1993645992 hasRelatedWork W2183389278 @default.
- W1993645992 isParatext "false" @default.
- W1993645992 isRetracted "false" @default.
- W1993645992 magId "1993645992" @default.
- W1993645992 workType "article" @default.