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- W1993648422 abstract "The aim of this work is to report the preparation and some chemical and physical properties of high-density silicon nitride thin films. The films are prepared by plasma-enhanced chemical vapor deposition (PECVD) at low frequency (50 kHz) with helium dilution and different silane/nitrogen/ammonia gas mixtures. In the best case the atomic hydrogen density is less than 7 × 1021 atoms/cm3, mainly bound in NH sites, with a very low etch rate of 10 Å/min. The thermal stability and the diffusion barrier properties have been checked. This material must be a good candidate for chemical grafting and as a protective layer in chemical sensors." @default.
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- W1993648422 date "1992-04-01" @default.
- W1993648422 modified "2023-10-04" @default.
- W1993648422 title "High-density silicon nitride thin film in PECVD" @default.
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- W1993648422 doi "https://doi.org/10.1016/0924-4247(92)80003-l" @default.
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