Matches in SemOpenAlex for { <https://semopenalex.org/work/W1993663736> ?p ?o ?g. }
- W1993663736 endingPage "586" @default.
- W1993663736 startingPage "577" @default.
- W1993663736 abstract "Single-crystal Si has been implanted with O+ ions at 2 MeV energy, to doses from 0.1 to 2×1018 O+ cm−2 and at substrate temperatures between 90 K and 700 °C. Infrared reflection spectra in the transparent region 1500–7000 cm−1 were measured and interference fringes were observed. A detailed theoretical analysis of the interference fringes yields refractive index profiles which provide accurate measurements of the range and straggle of the implanted ions, the Si overlayer crystallinity, and the oxygen concentration depth profile. The implantation temperature influences the crystallinity of the Si overlayer but not the oxygen distribution. The measured range parameters are in agreement with theory. The 2 MeV results are compared to results from 200 and 90 keV implants, which show that the method is applicable for a wide range of separation by implantation of oxygen structures. Rutherford backscattering spectroscopy and ion channeling results are in good agreement with the infrared results. It is concluded that infrared spectroscopy is the most convenient and inexpensive nondestructive technique to investigate structures formed by MeV and lower-energy O+ implantation." @default.
- W1993663736 created "2016-06-24" @default.
- W1993663736 creator A5039742832 @default.
- W1993663736 creator A5047662668 @default.
- W1993663736 creator A5080532734 @default.
- W1993663736 date "1995-01-15" @default.
- W1993663736 modified "2023-10-14" @default.
- W1993663736 title "Oxide growth, refractive index, and composition depth profiles of structures formed by 2 MeV oxygen implantation into silicon" @default.
- W1993663736 cites W1965264626 @default.
- W1993663736 cites W1966456028 @default.
- W1993663736 cites W1967576038 @default.
- W1993663736 cites W1970620759 @default.
- W1993663736 cites W1971027423 @default.
- W1993663736 cites W1974017507 @default.
- W1993663736 cites W1976509750 @default.
- W1993663736 cites W1981459513 @default.
- W1993663736 cites W1993364018 @default.
- W1993663736 cites W1994158144 @default.
- W1993663736 cites W2005412128 @default.
- W1993663736 cites W2006972543 @default.
- W1993663736 cites W2009756108 @default.
- W1993663736 cites W2013650917 @default.
- W1993663736 cites W2014251813 @default.
- W1993663736 cites W2021410329 @default.
- W1993663736 cites W2025353340 @default.
- W1993663736 cites W2025362036 @default.
- W1993663736 cites W2029959872 @default.
- W1993663736 cites W2032825719 @default.
- W1993663736 cites W2034615424 @default.
- W1993663736 cites W2040390390 @default.
- W1993663736 cites W2041539939 @default.
- W1993663736 cites W2042298543 @default.
- W1993663736 cites W2043885612 @default.
- W1993663736 cites W2044679941 @default.
- W1993663736 cites W2061661918 @default.
- W1993663736 cites W2062877670 @default.
- W1993663736 cites W2063500654 @default.
- W1993663736 cites W2065210403 @default.
- W1993663736 cites W2078388758 @default.
- W1993663736 cites W2081050673 @default.
- W1993663736 cites W2085279622 @default.
- W1993663736 cites W2085892660 @default.
- W1993663736 cites W2088263900 @default.
- W1993663736 cites W2091584470 @default.
- W1993663736 cites W2092220720 @default.
- W1993663736 cites W2092999955 @default.
- W1993663736 cites W2098514665 @default.
- W1993663736 cites W2100661118 @default.
- W1993663736 cites W2140127807 @default.
- W1993663736 cites W2145083371 @default.
- W1993663736 doi "https://doi.org/10.1063/1.359041" @default.
- W1993663736 hasPublicationYear "1995" @default.
- W1993663736 type Work @default.
- W1993663736 sameAs 1993663736 @default.
- W1993663736 citedByCount "5" @default.
- W1993663736 crossrefType "journal-article" @default.
- W1993663736 hasAuthorship W1993663736A5039742832 @default.
- W1993663736 hasAuthorship W1993663736A5047662668 @default.
- W1993663736 hasAuthorship W1993663736A5080532734 @default.
- W1993663736 hasConcept C113196181 @default.
- W1993663736 hasConcept C120665830 @default.
- W1993663736 hasConcept C121332964 @default.
- W1993663736 hasConcept C145148216 @default.
- W1993663736 hasConcept C147789679 @default.
- W1993663736 hasConcept C153642686 @default.
- W1993663736 hasConcept C158355884 @default.
- W1993663736 hasConcept C159985019 @default.
- W1993663736 hasConcept C178790620 @default.
- W1993663736 hasConcept C185592680 @default.
- W1993663736 hasConcept C192562407 @default.
- W1993663736 hasConcept C2775913835 @default.
- W1993663736 hasConcept C41823505 @default.
- W1993663736 hasConcept C42067758 @default.
- W1993663736 hasConcept C43617362 @default.
- W1993663736 hasConcept C46275449 @default.
- W1993663736 hasConcept C49040817 @default.
- W1993663736 hasConcept C540031477 @default.
- W1993663736 hasConcept C544956773 @default.
- W1993663736 hasConceptScore W1993663736C113196181 @default.
- W1993663736 hasConceptScore W1993663736C120665830 @default.
- W1993663736 hasConceptScore W1993663736C121332964 @default.
- W1993663736 hasConceptScore W1993663736C145148216 @default.
- W1993663736 hasConceptScore W1993663736C147789679 @default.
- W1993663736 hasConceptScore W1993663736C153642686 @default.
- W1993663736 hasConceptScore W1993663736C158355884 @default.
- W1993663736 hasConceptScore W1993663736C159985019 @default.
- W1993663736 hasConceptScore W1993663736C178790620 @default.
- W1993663736 hasConceptScore W1993663736C185592680 @default.
- W1993663736 hasConceptScore W1993663736C192562407 @default.
- W1993663736 hasConceptScore W1993663736C2775913835 @default.
- W1993663736 hasConceptScore W1993663736C41823505 @default.
- W1993663736 hasConceptScore W1993663736C42067758 @default.
- W1993663736 hasConceptScore W1993663736C43617362 @default.
- W1993663736 hasConceptScore W1993663736C46275449 @default.
- W1993663736 hasConceptScore W1993663736C49040817 @default.
- W1993663736 hasConceptScore W1993663736C540031477 @default.
- W1993663736 hasConceptScore W1993663736C544956773 @default.
- W1993663736 hasIssue "2" @default.