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- W1993669897 abstract "We describe the temporal development of the plasma composition in a pulsed plasma stream generated by cathodic arc. Cathodes of Zr and Cr were operated at various nitrogen pressures. The time-resolved plasma composition for the cathode materials was analyzed with time-of-flight charge-to-mass spectrometry, and was found to be a strong function of the nitrogen pressure. Large plasma composition gradients were detected within the first 60 μs of the pulse, the nitrogen ion concentration increasing with increasing pressure. The results are explained by the formation and erosion of a compound layer formed at the cathode surface in the presence of a reactive gas. The average charge state was also found to be affected by the reactive gas pressure as well as by the time after ignition. The charge states were highest in the beginning of the pulse at low nitrogen pressure, decreasing to a steady-state value at higher pressure. These results are of importance for reactive plasma processing and for controlling the evolution of thin film composition and microstructure." @default.
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- W1993669897 date "2003-07-18" @default.
- W1993669897 modified "2023-10-17" @default.
- W1993669897 title "Temporal development of the composition of Zr and Cr cathodic arc plasma streams in a N2 environment" @default.
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- W1993669897 doi "https://doi.org/10.1063/1.1591079" @default.
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