Matches in SemOpenAlex for { <https://semopenalex.org/work/W1993734697> ?p ?o ?g. }
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- W1993734697 endingPage "925" @default.
- W1993734697 startingPage "925" @default.
- W1993734697 abstract "The etching rate in dilute acids of iron oxide thin films prepared either by sputtering in mixtures or by low temperature chemical vapor deposition techniques, may be modified by irradiation with an argon‐ion cw laser. Depending on the exposure time and power levels used, laser irradiation may (i) leave the film unaffected, (ii) greatly reduce its solubility, or (iii) completely remove the film. For exposures ranging from several seconds to a few minutes, the power level necessary to produce low solubility is several hundred milliwatts per square millimeter. Film evaporation begins at a few watts per square millimeter. By rapidly translating the film through the focal point of a laser beam, regions of reduced solubility in the form of a line as narrow as 1 μm have been obtained at writing velocities of 2000 cm/sec. It is proposed that with these techniques, iron oxide see through masks for use in integrated circuit technology may be written directly." @default.
- W1993734697 created "2016-06-24" @default.
- W1993734697 creator A5004344743 @default.
- W1993734697 creator A5006206064 @default.
- W1993734697 creator A5050638572 @default.
- W1993734697 date "1974-01-01" @default.
- W1993734697 modified "2023-09-23" @default.
- W1993734697 title "Iron Oxide—An Inorganic Photoresist and Mask Material" @default.
- W1993734697 doi "https://doi.org/10.1149/1.2401954" @default.
- W1993734697 hasPublicationYear "1974" @default.
- W1993734697 type Work @default.
- W1993734697 sameAs 1993734697 @default.
- W1993734697 citedByCount "11" @default.
- W1993734697 crossrefType "journal-article" @default.
- W1993734697 hasAuthorship W1993734697A5004344743 @default.
- W1993734697 hasAuthorship W1993734697A5006206064 @default.
- W1993734697 hasAuthorship W1993734697A5050638572 @default.
- W1993734697 hasConcept C100460472 @default.
- W1993734697 hasConcept C111337013 @default.
- W1993734697 hasConcept C113196181 @default.
- W1993734697 hasConcept C120665830 @default.
- W1993734697 hasConcept C121332964 @default.
- W1993734697 hasConcept C134406635 @default.
- W1993734697 hasConcept C151730666 @default.
- W1993734697 hasConcept C155574463 @default.
- W1993734697 hasConcept C171250308 @default.
- W1993734697 hasConcept C178790620 @default.
- W1993734697 hasConcept C185544564 @default.
- W1993734697 hasConcept C185592680 @default.
- W1993734697 hasConcept C19067145 @default.
- W1993734697 hasConcept C191897082 @default.
- W1993734697 hasConcept C192562407 @default.
- W1993734697 hasConcept C22423302 @default.
- W1993734697 hasConcept C2777697756 @default.
- W1993734697 hasConcept C2779227376 @default.
- W1993734697 hasConcept C2779851234 @default.
- W1993734697 hasConcept C2816523 @default.
- W1993734697 hasConcept C43617362 @default.
- W1993734697 hasConcept C520434653 @default.
- W1993734697 hasConcept C547737533 @default.
- W1993734697 hasConcept C61441594 @default.
- W1993734697 hasConcept C64297162 @default.
- W1993734697 hasConcept C86803240 @default.
- W1993734697 hasConcept C97355855 @default.
- W1993734697 hasConceptScore W1993734697C100460472 @default.
- W1993734697 hasConceptScore W1993734697C111337013 @default.
- W1993734697 hasConceptScore W1993734697C113196181 @default.
- W1993734697 hasConceptScore W1993734697C120665830 @default.
- W1993734697 hasConceptScore W1993734697C121332964 @default.
- W1993734697 hasConceptScore W1993734697C134406635 @default.
- W1993734697 hasConceptScore W1993734697C151730666 @default.
- W1993734697 hasConceptScore W1993734697C155574463 @default.
- W1993734697 hasConceptScore W1993734697C171250308 @default.
- W1993734697 hasConceptScore W1993734697C178790620 @default.
- W1993734697 hasConceptScore W1993734697C185544564 @default.
- W1993734697 hasConceptScore W1993734697C185592680 @default.
- W1993734697 hasConceptScore W1993734697C19067145 @default.
- W1993734697 hasConceptScore W1993734697C191897082 @default.
- W1993734697 hasConceptScore W1993734697C192562407 @default.
- W1993734697 hasConceptScore W1993734697C22423302 @default.
- W1993734697 hasConceptScore W1993734697C2777697756 @default.
- W1993734697 hasConceptScore W1993734697C2779227376 @default.
- W1993734697 hasConceptScore W1993734697C2779851234 @default.
- W1993734697 hasConceptScore W1993734697C2816523 @default.
- W1993734697 hasConceptScore W1993734697C43617362 @default.
- W1993734697 hasConceptScore W1993734697C520434653 @default.
- W1993734697 hasConceptScore W1993734697C547737533 @default.
- W1993734697 hasConceptScore W1993734697C61441594 @default.
- W1993734697 hasConceptScore W1993734697C64297162 @default.
- W1993734697 hasConceptScore W1993734697C86803240 @default.
- W1993734697 hasConceptScore W1993734697C97355855 @default.
- W1993734697 hasIssue "7" @default.
- W1993734697 hasLocation W19937346971 @default.
- W1993734697 hasOpenAccess W1993734697 @default.
- W1993734697 hasPrimaryLocation W19937346971 @default.
- W1993734697 hasRelatedWork W1980760385 @default.
- W1993734697 hasRelatedWork W1994730660 @default.
- W1993734697 hasRelatedWork W1997010164 @default.
- W1993734697 hasRelatedWork W2041748642 @default.
- W1993734697 hasRelatedWork W2044881423 @default.
- W1993734697 hasRelatedWork W2069578568 @default.
- W1993734697 hasRelatedWork W2077106834 @default.
- W1993734697 hasRelatedWork W2093286625 @default.
- W1993734697 hasRelatedWork W2321690658 @default.
- W1993734697 hasRelatedWork W2517819420 @default.
- W1993734697 hasVolume "121" @default.
- W1993734697 isParatext "false" @default.
- W1993734697 isRetracted "false" @default.
- W1993734697 magId "1993734697" @default.
- W1993734697 workType "article" @default.