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- W1993735600 abstract "We have investigated the use of annular illumination on a KrF excimer laser stepper ((lambda) equals 248 nm) working near the resolution limit of the lens. The numerical aperture of the lens was 0.48 and the illuminator-lens combination produced a partial coherence of 0.44. With a central obscuration equal to 75% of the diameter of the illuminator aperture in place and using a surface-imaging resist process, we have increased the depth of focus for 0.25 micrometers dense lines and spaces from 0.9 micrometers at one point in the imaging field to 1.5 micrometers . Performance for dense contacts was also improved. These improvements demonstrate the feasibility of 0.25 micrometers technology with deep-UV lithography." @default.
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- W1993735600 date "1993-08-08" @default.
- W1993735600 modified "2023-09-23" @default.
- W1993735600 title "Quarter-micron lithography using a deep-UV stepper with modified illumination" @default.
- W1993735600 doi "https://doi.org/10.1117/12.150421" @default.
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