Matches in SemOpenAlex for { <https://semopenalex.org/work/W1993788630> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W1993788630 abstract "Nonlinearity and non-uniformity of phase-shifts significantly contribute to the error of the evaluated phase in phase-shifting interferometry. However, state of the art error-compensating algorithms can counteract the linear mis-calibration and first-order nonlinearity associated with the phase-shift. We describe an error expansion method that is utilized to construct a phase-shifting algorithm that can compensate the second-order nonlinearity and non-uniformity of phase-shifts. The conditions for eliminating the effect of second-order nonlinearity and non-uniformity of phase-shifts are given as a set of linear equations for the sampling amplitudes. We developed a novel 11-sample phase-shifting algorithm that can compensate for the second-order nonlinearity and non-uniformity of phase-shifts and is robust up to a 4<sup>th</sup> harmonic. Experimental results show that the surface shape of a transparent plate could be measured with a precision of 1 nm, over the 120-mm-diameter aperture." @default.
- W1993788630 created "2016-06-24" @default.
- W1993788630 creator A5026623974 @default.
- W1993788630 creator A5030659108 @default.
- W1993788630 creator A5065462826 @default.
- W1993788630 creator A5066346075 @default.
- W1993788630 date "2014-04-02" @default.
- W1993788630 modified "2023-10-03" @default.
- W1993788630 title "Design of the phase-shifting algorithm for flatness measurement of a mask blank glass" @default.
- W1993788630 cites W1599561640 @default.
- W1993788630 cites W1965285093 @default.
- W1993788630 cites W1974144145 @default.
- W1993788630 cites W1985782263 @default.
- W1993788630 cites W1990425051 @default.
- W1993788630 cites W2002923469 @default.
- W1993788630 cites W2026686453 @default.
- W1993788630 cites W2055759957 @default.
- W1993788630 cites W2080078135 @default.
- W1993788630 cites W2096309156 @default.
- W1993788630 cites W2105294749 @default.
- W1993788630 cites W2121306184 @default.
- W1993788630 cites W2135268721 @default.
- W1993788630 cites W2163247994 @default.
- W1993788630 cites W2163774224 @default.
- W1993788630 doi "https://doi.org/10.1117/12.2045319" @default.
- W1993788630 hasPublicationYear "2014" @default.
- W1993788630 type Work @default.
- W1993788630 sameAs 1993788630 @default.
- W1993788630 citedByCount "0" @default.
- W1993788630 crossrefType "proceedings-article" @default.
- W1993788630 hasAuthorship W1993788630A5026623974 @default.
- W1993788630 hasAuthorship W1993788630A5030659108 @default.
- W1993788630 hasAuthorship W1993788630A5065462826 @default.
- W1993788630 hasAuthorship W1993788630A5066346075 @default.
- W1993788630 hasConcept C105795698 @default.
- W1993788630 hasConcept C11413529 @default.
- W1993788630 hasConcept C120665830 @default.
- W1993788630 hasConcept C121332964 @default.
- W1993788630 hasConcept C158622935 @default.
- W1993788630 hasConcept C159985019 @default.
- W1993788630 hasConcept C166689943 @default.
- W1993788630 hasConcept C180205008 @default.
- W1993788630 hasConcept C192562407 @default.
- W1993788630 hasConcept C19619285 @default.
- W1993788630 hasConcept C20610874 @default.
- W1993788630 hasConcept C26405456 @default.
- W1993788630 hasConcept C2778089247 @default.
- W1993788630 hasConcept C2778530986 @default.
- W1993788630 hasConcept C33923547 @default.
- W1993788630 hasConcept C41008148 @default.
- W1993788630 hasConcept C44280652 @default.
- W1993788630 hasConcept C54767332 @default.
- W1993788630 hasConcept C62520636 @default.
- W1993788630 hasConceptScore W1993788630C105795698 @default.
- W1993788630 hasConceptScore W1993788630C11413529 @default.
- W1993788630 hasConceptScore W1993788630C120665830 @default.
- W1993788630 hasConceptScore W1993788630C121332964 @default.
- W1993788630 hasConceptScore W1993788630C158622935 @default.
- W1993788630 hasConceptScore W1993788630C159985019 @default.
- W1993788630 hasConceptScore W1993788630C166689943 @default.
- W1993788630 hasConceptScore W1993788630C180205008 @default.
- W1993788630 hasConceptScore W1993788630C192562407 @default.
- W1993788630 hasConceptScore W1993788630C19619285 @default.
- W1993788630 hasConceptScore W1993788630C20610874 @default.
- W1993788630 hasConceptScore W1993788630C26405456 @default.
- W1993788630 hasConceptScore W1993788630C2778089247 @default.
- W1993788630 hasConceptScore W1993788630C2778530986 @default.
- W1993788630 hasConceptScore W1993788630C33923547 @default.
- W1993788630 hasConceptScore W1993788630C41008148 @default.
- W1993788630 hasConceptScore W1993788630C44280652 @default.
- W1993788630 hasConceptScore W1993788630C54767332 @default.
- W1993788630 hasConceptScore W1993788630C62520636 @default.
- W1993788630 hasLocation W19937886301 @default.
- W1993788630 hasOpenAccess W1993788630 @default.
- W1993788630 hasPrimaryLocation W19937886301 @default.
- W1993788630 hasRelatedWork W1651377185 @default.
- W1993788630 hasRelatedWork W1993788630 @default.
- W1993788630 hasRelatedWork W2015508553 @default.
- W1993788630 hasRelatedWork W2058234589 @default.
- W1993788630 hasRelatedWork W2078603042 @default.
- W1993788630 hasRelatedWork W2083436602 @default.
- W1993788630 hasRelatedWork W2093479232 @default.
- W1993788630 hasRelatedWork W2138848125 @default.
- W1993788630 hasRelatedWork W2530927857 @default.
- W1993788630 hasRelatedWork W2900979096 @default.
- W1993788630 isParatext "false" @default.
- W1993788630 isRetracted "false" @default.
- W1993788630 magId "1993788630" @default.
- W1993788630 workType "article" @default.