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- W1993810909 abstract "We have deposited a-Si:H films by RPECVD (substrate temperatures, Ts = 38 to 400°C) and have studied the IR and optical absorbance, and other electrical and optical properties. The RPECVD films differ from glow discharge (GD) and sputtered films most notably in the Ts dependence of the hydrogen bonding environments (SiH, SiH2, etc.), and the photoconductivity. RPECVD films produced with Ts = 235°C have properties comparable to ‘device grade’ GD films." @default.
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- W1993810909 date "1987-12-01" @default.
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- W1993810909 title "Optical and electrical properties of a-Si:H films grown by remote plasma enhanced chemical vapor deposition (RPECVD)" @default.
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- W1993810909 doi "https://doi.org/10.1016/0022-3093(87)90329-2" @default.
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