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- W1993819344 abstract "Abstract The redistribution of Zr and Hf implanted into InP and GaAs and the lattice recrystallization after annealing are studied. Zr and Hf profiles are measured by secondary ion mass spectroscopy. The recryslallization is evaluated by Rutherford backscattering/ channeling and X-ray double crystal diffractometry. After low dose implantation, both Zr and Hf show absolute thermal stability under standard heat treatments. Only after high dose implantation Zr is found to accumulate below the surface and to diffuse slowly into the bulk of InP and GaAs samples with a more pronounced redistribution in InP than in GaAs. Hafnium, in contrast, proves to be thermally stable even under extreme implantation and annealing conditions. A novel Zr-related level with an activation energy of (0.53±0.03) eV is identified in Zr doped n-InP:Si by deep level transient spectroscopy." @default.
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- W1993819344 date "1993-06-01" @default.
- W1993819344 modified "2023-10-02" @default.
- W1993819344 title "Ion implantation of zirconium and hafnium in InP and GaAs" @default.
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- W1993819344 doi "https://doi.org/10.1016/0168-583x(93)96209-u" @default.
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