Matches in SemOpenAlex for { <https://semopenalex.org/work/W1993903773> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W1993903773 abstract "New approach to the surface patterning is considered based on UV laser assisted decomposition of films of silicon organic compounds (SOC). Basic regimes of films processing are studied :the direct laser produced transformation of Soc into the silicon oxide, self— developing (ablating) as well as conventional UV laser lithography. Submicron structures of high quality silicon dioxide are realized" @default.
- W1993903773 created "2016-06-24" @default.
- W1993903773 creator A5004169411 @default.
- W1993903773 creator A5021354422 @default.
- W1993903773 creator A5054871471 @default.
- W1993903773 creator A5073341426 @default.
- W1993903773 creator A5074481698 @default.
- W1993903773 creator A5078673500 @default.
- W1993903773 creator A5090953385 @default.
- W1993903773 date "1990-10-01" @default.
- W1993903773 modified "2023-09-23" @default.
- W1993903773 title "<title>Excimer laser assisted deposition of SiO2-structures on semiconductor substrates from siliconorganic films</title>" @default.
- W1993903773 doi "https://doi.org/10.1117/12.23695" @default.
- W1993903773 hasPublicationYear "1990" @default.
- W1993903773 type Work @default.
- W1993903773 sameAs 1993903773 @default.
- W1993903773 citedByCount "0" @default.
- W1993903773 crossrefType "proceedings-article" @default.
- W1993903773 hasAuthorship W1993903773A5004169411 @default.
- W1993903773 hasAuthorship W1993903773A5021354422 @default.
- W1993903773 hasAuthorship W1993903773A5054871471 @default.
- W1993903773 hasAuthorship W1993903773A5073341426 @default.
- W1993903773 hasAuthorship W1993903773A5074481698 @default.
- W1993903773 hasAuthorship W1993903773A5078673500 @default.
- W1993903773 hasAuthorship W1993903773A5090953385 @default.
- W1993903773 hasConcept C108225325 @default.
- W1993903773 hasConcept C120665830 @default.
- W1993903773 hasConcept C121332964 @default.
- W1993903773 hasConcept C151730666 @default.
- W1993903773 hasConcept C159985019 @default.
- W1993903773 hasConcept C171250308 @default.
- W1993903773 hasConcept C192562407 @default.
- W1993903773 hasConcept C204223013 @default.
- W1993903773 hasConcept C2779089622 @default.
- W1993903773 hasConcept C2780477314 @default.
- W1993903773 hasConcept C2816523 @default.
- W1993903773 hasConcept C49040817 @default.
- W1993903773 hasConcept C520434653 @default.
- W1993903773 hasConcept C544956773 @default.
- W1993903773 hasConcept C64297162 @default.
- W1993903773 hasConcept C86803240 @default.
- W1993903773 hasConceptScore W1993903773C108225325 @default.
- W1993903773 hasConceptScore W1993903773C120665830 @default.
- W1993903773 hasConceptScore W1993903773C121332964 @default.
- W1993903773 hasConceptScore W1993903773C151730666 @default.
- W1993903773 hasConceptScore W1993903773C159985019 @default.
- W1993903773 hasConceptScore W1993903773C171250308 @default.
- W1993903773 hasConceptScore W1993903773C192562407 @default.
- W1993903773 hasConceptScore W1993903773C204223013 @default.
- W1993903773 hasConceptScore W1993903773C2779089622 @default.
- W1993903773 hasConceptScore W1993903773C2780477314 @default.
- W1993903773 hasConceptScore W1993903773C2816523 @default.
- W1993903773 hasConceptScore W1993903773C49040817 @default.
- W1993903773 hasConceptScore W1993903773C520434653 @default.
- W1993903773 hasConceptScore W1993903773C544956773 @default.
- W1993903773 hasConceptScore W1993903773C64297162 @default.
- W1993903773 hasConceptScore W1993903773C86803240 @default.
- W1993903773 hasLocation W19939037731 @default.
- W1993903773 hasOpenAccess W1993903773 @default.
- W1993903773 hasPrimaryLocation W19939037731 @default.
- W1993903773 hasRelatedWork W1541197917 @default.
- W1993903773 hasRelatedWork W1825181944 @default.
- W1993903773 hasRelatedWork W1840882512 @default.
- W1993903773 hasRelatedWork W1993528874 @default.
- W1993903773 hasRelatedWork W2007207138 @default.
- W1993903773 hasRelatedWork W2012102424 @default.
- W1993903773 hasRelatedWork W2022721036 @default.
- W1993903773 hasRelatedWork W2044259314 @default.
- W1993903773 hasRelatedWork W2054979685 @default.
- W1993903773 hasRelatedWork W2085656191 @default.
- W1993903773 hasRelatedWork W2118600435 @default.
- W1993903773 hasRelatedWork W2142676988 @default.
- W1993903773 hasRelatedWork W2272896644 @default.
- W1993903773 hasRelatedWork W2379200896 @default.
- W1993903773 hasRelatedWork W3002813822 @default.
- W1993903773 hasRelatedWork W3008589876 @default.
- W1993903773 hasRelatedWork W3027255561 @default.
- W1993903773 hasRelatedWork W3148539140 @default.
- W1993903773 hasRelatedWork W3151630669 @default.
- W1993903773 hasRelatedWork W588022126 @default.
- W1993903773 isParatext "false" @default.
- W1993903773 isRetracted "false" @default.
- W1993903773 magId "1993903773" @default.
- W1993903773 workType "article" @default.