Matches in SemOpenAlex for { <https://semopenalex.org/work/W1993906902> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W1993906902 endingPage "1030" @default.
- W1993906902 startingPage "1028" @default.
- W1993906902 abstract "Three-dimensional (3D) integration of coaxial through silicon vias (TSVs) is becoming an area of considerable interest owing to their superior high-frequency performance in comparison to standard 3D interconnects. However, in contrast to standard TSVs, coaxial TSVs require more processing to integrate the ground shield surrounding the copper via. Cost-effective methods for implementing coaxial TSV technology with CMOS processing are challenging. Demonstrated is a low-cost fabrication method for integrating coaxial TSVs within the confines of a standard CMOS process is demonstrated." @default.
- W1993906902 created "2016-06-24" @default.
- W1993906902 creator A5018054249 @default.
- W1993906902 creator A5077302440 @default.
- W1993906902 creator A5087354334 @default.
- W1993906902 date "2013-08-01" @default.
- W1993906902 modified "2023-10-03" @default.
- W1993906902 title "Feasibility of coaxial through silicon via 3D integration" @default.
- W1993906902 cites W2007901850 @default.
- W1993906902 cites W2019878126 @default.
- W1993906902 cites W2115307333 @default.
- W1993906902 cites W2166803207 @default.
- W1993906902 doi "https://doi.org/10.1049/el.2013.1165" @default.
- W1993906902 hasPublicationYear "2013" @default.
- W1993906902 type Work @default.
- W1993906902 sameAs 1993906902 @default.
- W1993906902 citedByCount "28" @default.
- W1993906902 countsByYear W19939069022014 @default.
- W1993906902 countsByYear W19939069022015 @default.
- W1993906902 countsByYear W19939069022016 @default.
- W1993906902 countsByYear W19939069022017 @default.
- W1993906902 countsByYear W19939069022018 @default.
- W1993906902 countsByYear W19939069022019 @default.
- W1993906902 countsByYear W19939069022020 @default.
- W1993906902 countsByYear W19939069022022 @default.
- W1993906902 countsByYear W19939069022023 @default.
- W1993906902 crossrefType "journal-article" @default.
- W1993906902 hasAuthorship W1993906902A5018054249 @default.
- W1993906902 hasAuthorship W1993906902A5077302440 @default.
- W1993906902 hasAuthorship W1993906902A5087354334 @default.
- W1993906902 hasBestOaLocation W19939069021 @default.
- W1993906902 hasConcept C110925319 @default.
- W1993906902 hasConcept C119599485 @default.
- W1993906902 hasConcept C127413603 @default.
- W1993906902 hasConcept C136525101 @default.
- W1993906902 hasConcept C142724271 @default.
- W1993906902 hasConcept C192562407 @default.
- W1993906902 hasConcept C204787440 @default.
- W1993906902 hasConcept C24326235 @default.
- W1993906902 hasConcept C2777663116 @default.
- W1993906902 hasConcept C45632049 @default.
- W1993906902 hasConcept C46362747 @default.
- W1993906902 hasConcept C49040817 @default.
- W1993906902 hasConcept C51221625 @default.
- W1993906902 hasConcept C544956773 @default.
- W1993906902 hasConcept C71924100 @default.
- W1993906902 hasConceptScore W1993906902C110925319 @default.
- W1993906902 hasConceptScore W1993906902C119599485 @default.
- W1993906902 hasConceptScore W1993906902C127413603 @default.
- W1993906902 hasConceptScore W1993906902C136525101 @default.
- W1993906902 hasConceptScore W1993906902C142724271 @default.
- W1993906902 hasConceptScore W1993906902C192562407 @default.
- W1993906902 hasConceptScore W1993906902C204787440 @default.
- W1993906902 hasConceptScore W1993906902C24326235 @default.
- W1993906902 hasConceptScore W1993906902C2777663116 @default.
- W1993906902 hasConceptScore W1993906902C45632049 @default.
- W1993906902 hasConceptScore W1993906902C46362747 @default.
- W1993906902 hasConceptScore W1993906902C49040817 @default.
- W1993906902 hasConceptScore W1993906902C51221625 @default.
- W1993906902 hasConceptScore W1993906902C544956773 @default.
- W1993906902 hasConceptScore W1993906902C71924100 @default.
- W1993906902 hasIssue "16" @default.
- W1993906902 hasLocation W19939069021 @default.
- W1993906902 hasOpenAccess W1993906902 @default.
- W1993906902 hasPrimaryLocation W19939069021 @default.
- W1993906902 hasRelatedWork W1992809611 @default.
- W1993906902 hasRelatedWork W2002673388 @default.
- W1993906902 hasRelatedWork W2030805690 @default.
- W1993906902 hasRelatedWork W2153443121 @default.
- W1993906902 hasRelatedWork W2610117430 @default.
- W1993906902 hasRelatedWork W2799800065 @default.
- W1993906902 hasRelatedWork W2899084033 @default.
- W1993906902 hasRelatedWork W4381745617 @default.
- W1993906902 hasRelatedWork W1656022518 @default.
- W1993906902 hasRelatedWork W2085906308 @default.
- W1993906902 hasVolume "49" @default.
- W1993906902 isParatext "false" @default.
- W1993906902 isRetracted "false" @default.
- W1993906902 magId "1993906902" @default.
- W1993906902 workType "article" @default.