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• W1993977602 abstract "Antimony trihydride(stibine), SbH3, and antimony trideuteride, SbD3, were synthesized in high yields via a unique nonaqueous synthetic route. A study comparing the relative thermal stability of SbD3 with that of SbH3 was performed. Deuterated stibine displays significantly greater thermal stability than its hydride analogue due to isotopic stabilization and can be stored at room temperature for weeks with minimal decomposition. The thermal decomposition of SbD3 was performed at 300 °C in a horizontal, hot-wall chemical vapor deposition (CVD) reactor. Decomposition efficiencies approaching 50% were achieved when SbD3 was delivered with H2 as a carrier gas. As this research demonstrates, deuterated stibine is an improved CVD source due to its gaseous nature, compositional simplicity, lack of Sb−C bonds, enhanced thermal stability, and ability to deposit Sb films at very low temperatures." @default.
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• W1993977602 date "1999-02-02" @default.
• W1993977602 modified "2023-10-03" @default.
• W1993977602 title "Synthesis and Stabilization of Stibine for Low-Temperature Chemical Vapor Deposition of Carbon-Free Antimony Films" @default.
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• W1993977602 doi "https://doi.org/10.1021/cm980121m" @default.
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