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- W1993977734 abstract "A stochastic resist simulator has first been calibrated to experimental results performed on a commercially available EUV resist, and subsequently has been used to study the influence of acid/base quenching rate and the polymer deprotection rate on resist LER for 22 nm half-pitch lines/spaces. Results indicate that larger quenching rates and smaller deprotection rates result in improved LER performance by causing an increase in the dose to size. With nominal quenching rate determined from literature, halving the deprotection rate relative to nominal value reduces the LER by 33%, while the dose to size increases by 2x. With nominal deprotection rate determined from literature, results indicate a low sensitivity of LER to quenching rate. Expected noise at the line edge calculated by using a shot noise model accounting for absorbed photons, acid, and base count, provides a good explanation for the LER trends calculated for several reaction rate scenarios." @default.
- W1993977734 created "2016-06-24" @default.
- W1993977734 creator A5003343236 @default.
- W1993977734 creator A5077460481 @default.
- W1993977734 creator A5086850276 @default.
- W1993977734 date "2015-04-06" @default.
- W1993977734 modified "2023-09-23" @default.
- W1993977734 title "Simulation study of the influence of PEB reaction rates on resist LER" @default.
- W1993977734 cites W2010203879 @default.
- W1993977734 cites W2144505424 @default.
- W1993977734 cites W2155033689 @default.
- W1993977734 doi "https://doi.org/10.1117/12.2087566" @default.
- W1993977734 hasPublicationYear "2015" @default.
- W1993977734 type Work @default.
- W1993977734 sameAs 1993977734 @default.
- W1993977734 citedByCount "2" @default.
- W1993977734 countsByYear W19939777342017 @default.
- W1993977734 crossrefType "proceedings-article" @default.
- W1993977734 hasAuthorship W1993977734A5003343236 @default.
- W1993977734 hasAuthorship W1993977734A5077460481 @default.
- W1993977734 hasAuthorship W1993977734A5086850276 @default.
- W1993977734 hasConcept C113196181 @default.
- W1993977734 hasConcept C115961682 @default.
- W1993977734 hasConcept C120665830 @default.
- W1993977734 hasConcept C121332964 @default.
- W1993977734 hasConcept C121745418 @default.
- W1993977734 hasConcept C154945302 @default.
- W1993977734 hasConcept C159985019 @default.
- W1993977734 hasConcept C161790260 @default.
- W1993977734 hasConcept C162996421 @default.
- W1993977734 hasConcept C171250308 @default.
- W1993977734 hasConcept C175113610 @default.
- W1993977734 hasConcept C178790620 @default.
- W1993977734 hasConcept C185592680 @default.
- W1993977734 hasConcept C192562407 @default.
- W1993977734 hasConcept C2779227376 @default.
- W1993977734 hasConcept C41008148 @default.
- W1993977734 hasConcept C43617362 @default.
- W1993977734 hasConcept C49040817 @default.
- W1993977734 hasConcept C521977710 @default.
- W1993977734 hasConcept C53524968 @default.
- W1993977734 hasConcept C72659945 @default.
- W1993977734 hasConcept C91881484 @default.
- W1993977734 hasConcept C94915269 @default.
- W1993977734 hasConcept C99498987 @default.
- W1993977734 hasConceptScore W1993977734C113196181 @default.
- W1993977734 hasConceptScore W1993977734C115961682 @default.
- W1993977734 hasConceptScore W1993977734C120665830 @default.
- W1993977734 hasConceptScore W1993977734C121332964 @default.
- W1993977734 hasConceptScore W1993977734C121745418 @default.
- W1993977734 hasConceptScore W1993977734C154945302 @default.
- W1993977734 hasConceptScore W1993977734C159985019 @default.
- W1993977734 hasConceptScore W1993977734C161790260 @default.
- W1993977734 hasConceptScore W1993977734C162996421 @default.
- W1993977734 hasConceptScore W1993977734C171250308 @default.
- W1993977734 hasConceptScore W1993977734C175113610 @default.
- W1993977734 hasConceptScore W1993977734C178790620 @default.
- W1993977734 hasConceptScore W1993977734C185592680 @default.
- W1993977734 hasConceptScore W1993977734C192562407 @default.
- W1993977734 hasConceptScore W1993977734C2779227376 @default.
- W1993977734 hasConceptScore W1993977734C41008148 @default.
- W1993977734 hasConceptScore W1993977734C43617362 @default.
- W1993977734 hasConceptScore W1993977734C49040817 @default.
- W1993977734 hasConceptScore W1993977734C521977710 @default.
- W1993977734 hasConceptScore W1993977734C53524968 @default.
- W1993977734 hasConceptScore W1993977734C72659945 @default.
- W1993977734 hasConceptScore W1993977734C91881484 @default.
- W1993977734 hasConceptScore W1993977734C94915269 @default.
- W1993977734 hasConceptScore W1993977734C99498987 @default.
- W1993977734 hasLocation W19939777341 @default.
- W1993977734 hasOpenAccess W1993977734 @default.
- W1993977734 hasPrimaryLocation W19939777341 @default.
- W1993977734 hasRelatedWork W1987038629 @default.
- W1993977734 hasRelatedWork W1987563355 @default.
- W1993977734 hasRelatedWork W1993977734 @default.
- W1993977734 hasRelatedWork W1996211766 @default.
- W1993977734 hasRelatedWork W2034439267 @default.
- W1993977734 hasRelatedWork W2042846661 @default.
- W1993977734 hasRelatedWork W2052439749 @default.
- W1993977734 hasRelatedWork W2080416894 @default.
- W1993977734 hasRelatedWork W2082311130 @default.
- W1993977734 hasRelatedWork W2612227576 @default.
- W1993977734 isParatext "false" @default.
- W1993977734 isRetracted "false" @default.
- W1993977734 magId "1993977734" @default.
- W1993977734 workType "article" @default.