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- W1994042826 abstract "Aluminum nitride thin films have been fabricated by reaction of laser evaporated Al in a NH3 atmosphere. The results indicate that AlN may deposit on a suitable substrate in a hexagonal crystal structure. A fairly dense homogeneous texture of the film surface morphology is seen by scanning electron microscopy (SEM). The main process parameters to produce layers of this material have been investigated." @default.
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- W1994042826 date "1997-02-01" @default.
- W1994042826 modified "2023-09-24" @default.
- W1994042826 title "Polycrystalline aluminum nitride films prepared by laser assisted Al and NH3 reaction" @default.
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- W1994042826 doi "https://doi.org/10.1016/s0169-4332(96)00630-7" @default.
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