Matches in SemOpenAlex for { <https://semopenalex.org/work/W1994059181> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W1994059181 endingPage "2223" @default.
- W1994059181 startingPage "2220" @default.
- W1994059181 abstract "In this paper we report the growth and Silicon doping of AlGaN films in the entire alloy composition by RF-plasma-assisted MBE. The films (0.7 to 0.8 µm thick) were grown with the (0001) polarity on C-plane sapphire substrates using a thin AlN buffer and were doped n-type with the silicon cell at a constant temperature (1200 °C). The composition and the structure of the films were determined by XRD, the silicon and oxygen impurities were determined by SIMS measurements, and the transport coefficients were obtained from Hall effect measurements. The FWHM of the on- and off-axis XRD rocking curves indicate that the microstructure of the films is better at low AlN mole fraction (<20%) and high AlN mole fraction (>70%). The resistivity of the films varies from 10–3 to 25 Ω.cm as the AlN mole fraction increases from 0 to 96%. Reliable Hall effect measurements were carried out in films with up to 77% Al and were found to be degenerately n-type doped with room temperature carrier concentration varying from 1 × 1020 to 7.7 × 1018 cm–3 as the AlN mole fraction increased from 0 to 77%. Correspondingly, the electron mobility is reduced by almost an order of magnitude, a result which is consistent with alloy scattering. The effective mass of some of the samples was determined by combining infrared reflectivity and Hall Effect measurements and these data were used to determine the Si ionization energies. We concluded that the Si is the main donor in the entire alloy composition and that the gradual reduction of conductivity with Al content is due to the increase of the Si ionization energy. (© 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W1994059181 created "2016-06-24" @default.
- W1994059181 creator A5013915463 @default.
- W1994059181 creator A5019537071 @default.
- W1994059181 creator A5047087217 @default.
- W1994059181 creator A5085318720 @default.
- W1994059181 date "2005-04-11" @default.
- W1994059181 modified "2023-09-26" @default.
- W1994059181 title "Growth and silicon doping of AlGaN films in the entire alloy composition by molecular beam epitaxy" @default.
- W1994059181 cites W352538250 @default.
- W1994059181 doi "https://doi.org/10.1002/pssc.200461595" @default.
- W1994059181 hasPublicationYear "2005" @default.
- W1994059181 type Work @default.
- W1994059181 sameAs 1994059181 @default.
- W1994059181 citedByCount "19" @default.
- W1994059181 countsByYear W19940591812013 @default.
- W1994059181 countsByYear W19940591812015 @default.
- W1994059181 countsByYear W19940591812016 @default.
- W1994059181 countsByYear W19940591812017 @default.
- W1994059181 countsByYear W19940591812018 @default.
- W1994059181 crossrefType "journal-article" @default.
- W1994059181 hasAuthorship W1994059181A5013915463 @default.
- W1994059181 hasAuthorship W1994059181A5019537071 @default.
- W1994059181 hasAuthorship W1994059181A5047087217 @default.
- W1994059181 hasAuthorship W1994059181A5085318720 @default.
- W1994059181 hasConcept C108649604 @default.
- W1994059181 hasConcept C110738630 @default.
- W1994059181 hasConcept C113196181 @default.
- W1994059181 hasConcept C119599485 @default.
- W1994059181 hasConcept C120665830 @default.
- W1994059181 hasConcept C121332964 @default.
- W1994059181 hasConcept C127413603 @default.
- W1994059181 hasConcept C134112204 @default.
- W1994059181 hasConcept C147789679 @default.
- W1994059181 hasConcept C171250308 @default.
- W1994059181 hasConcept C178790620 @default.
- W1994059181 hasConcept C185592680 @default.
- W1994059181 hasConcept C191897082 @default.
- W1994059181 hasConcept C192562407 @default.
- W1994059181 hasConcept C2779227376 @default.
- W1994059181 hasConcept C2780026712 @default.
- W1994059181 hasConcept C2780064504 @default.
- W1994059181 hasConcept C36591836 @default.
- W1994059181 hasConcept C3792809 @default.
- W1994059181 hasConcept C43617362 @default.
- W1994059181 hasConcept C49040817 @default.
- W1994059181 hasConcept C520434653 @default.
- W1994059181 hasConcept C544956773 @default.
- W1994059181 hasConcept C57863236 @default.
- W1994059181 hasConcept C69990965 @default.
- W1994059181 hasConcept C71987851 @default.
- W1994059181 hasConcept C87976508 @default.
- W1994059181 hasConceptScore W1994059181C108649604 @default.
- W1994059181 hasConceptScore W1994059181C110738630 @default.
- W1994059181 hasConceptScore W1994059181C113196181 @default.
- W1994059181 hasConceptScore W1994059181C119599485 @default.
- W1994059181 hasConceptScore W1994059181C120665830 @default.
- W1994059181 hasConceptScore W1994059181C121332964 @default.
- W1994059181 hasConceptScore W1994059181C127413603 @default.
- W1994059181 hasConceptScore W1994059181C134112204 @default.
- W1994059181 hasConceptScore W1994059181C147789679 @default.
- W1994059181 hasConceptScore W1994059181C171250308 @default.
- W1994059181 hasConceptScore W1994059181C178790620 @default.
- W1994059181 hasConceptScore W1994059181C185592680 @default.
- W1994059181 hasConceptScore W1994059181C191897082 @default.
- W1994059181 hasConceptScore W1994059181C192562407 @default.
- W1994059181 hasConceptScore W1994059181C2779227376 @default.
- W1994059181 hasConceptScore W1994059181C2780026712 @default.
- W1994059181 hasConceptScore W1994059181C2780064504 @default.
- W1994059181 hasConceptScore W1994059181C36591836 @default.
- W1994059181 hasConceptScore W1994059181C3792809 @default.
- W1994059181 hasConceptScore W1994059181C43617362 @default.
- W1994059181 hasConceptScore W1994059181C49040817 @default.
- W1994059181 hasConceptScore W1994059181C520434653 @default.
- W1994059181 hasConceptScore W1994059181C544956773 @default.
- W1994059181 hasConceptScore W1994059181C57863236 @default.
- W1994059181 hasConceptScore W1994059181C69990965 @default.
- W1994059181 hasConceptScore W1994059181C71987851 @default.
- W1994059181 hasConceptScore W1994059181C87976508 @default.
- W1994059181 hasIssue "7" @default.
- W1994059181 hasLocation W19940591811 @default.
- W1994059181 hasOpenAccess W1994059181 @default.
- W1994059181 hasPrimaryLocation W19940591811 @default.
- W1994059181 hasRelatedWork W1980216138 @default.
- W1994059181 hasRelatedWork W1988308799 @default.
- W1994059181 hasRelatedWork W2007279922 @default.
- W1994059181 hasRelatedWork W2028994635 @default.
- W1994059181 hasRelatedWork W2035606228 @default.
- W1994059181 hasRelatedWork W2073926603 @default.
- W1994059181 hasRelatedWork W2105573592 @default.
- W1994059181 hasRelatedWork W2361829845 @default.
- W1994059181 hasRelatedWork W1655793830 @default.
- W1994059181 hasRelatedWork W2086371506 @default.
- W1994059181 hasVolume "2" @default.
- W1994059181 isParatext "false" @default.
- W1994059181 isRetracted "false" @default.
- W1994059181 magId "1994059181" @default.
- W1994059181 workType "article" @default.