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- W1994070522 abstract "Although wafer stepper technology seems to be the general trend in fabrication of VLSI circuits, the semiconductor industry is still evaluating the relative merits of 1X, 5X and 10X magnification. Field-proven early model reduction steppers are now being challenged by new lower-cost 1:1 steppers with comparable specifications, such as the Canon FPA-112FA. The present study takes a close look at the Canon FPA-112FA 1:1 wafer stepper as a production viable VLSI tool. Results obtained in processing a 2-poly NMOS process (1.7 micron minimum space) are presented." @default.
- W1994070522 created "2016-06-24" @default.
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- W1994070522 date "1983-11-07" @default.
- W1994070522 modified "2023-09-23" @default.
- W1994070522 title "<title>VLSI Lithography Using Canon 1:1 Wafer Stepper</title>" @default.
- W1994070522 doi "https://doi.org/10.1117/12.935127" @default.
- W1994070522 hasPublicationYear "1983" @default.
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