Matches in SemOpenAlex for { <https://semopenalex.org/work/W1994090728> ?p ?o ?g. }
- W1994090728 endingPage "335" @default.
- W1994090728 startingPage "329" @default.
- W1994090728 abstract "This paper presents an all-polymer microelectromechanical system technology in which a crosslinker is used to modify the electromechanical properties. The structural material of these microelectromechanical systems (MEMS) structures is a poly(3,4-ethylenedioxythiophene)/polystyrene sulfonate/polymethyl methacrylate (PEDOT/PSS/PMMA) blended conductive polymer. Microbridge resonators are fabricated using surface micromachining on glass substrates. The electromechanical properties of the polymer microbridges are studied using electrostatic actuation and optical and electrical detection. The resonance frequency of the polymer bridges occurs in the MHz range, with quality factors of the order of 100 when measured in vacuum. Addition of a silane-based crosslinker increases the Young's modulus of the polymer structural material which is reflected in higher resonance frequency, higher pull-in voltage, better long-term stability of the electrical conductivity, and in a decrease in the quality factor of the resonator. The mechanical properties of the polymer resonators are strongly affected by the residual stress because of the low Young's modulus, and by the measurement frequency and the measurement temperature due to the viscoelastic properties of the polymer structural material" @default.
- W1994090728 created "2016-06-24" @default.
- W1994090728 creator A5004436715 @default.
- W1994090728 creator A5067677610 @default.
- W1994090728 creator A5087548475 @default.
- W1994090728 date "2007-04-01" @default.
- W1994090728 modified "2023-09-27" @default.
- W1994090728 title "Conductive Blended Polymer MEMS Microresonators" @default.
- W1994090728 cites W1483033001 @default.
- W1994090728 cites W1964391626 @default.
- W1994090728 cites W1966917189 @default.
- W1994090728 cites W1971671932 @default.
- W1994090728 cites W1973959168 @default.
- W1994090728 cites W1975216008 @default.
- W1994090728 cites W1975221843 @default.
- W1994090728 cites W1976368326 @default.
- W1994090728 cites W1978360592 @default.
- W1994090728 cites W1986312909 @default.
- W1994090728 cites W2026479757 @default.
- W1994090728 cites W2028240311 @default.
- W1994090728 cites W2033153655 @default.
- W1994090728 cites W2045591236 @default.
- W1994090728 cites W2053959576 @default.
- W1994090728 cites W2062074587 @default.
- W1994090728 cites W2062116934 @default.
- W1994090728 cites W2070382774 @default.
- W1994090728 cites W2082983861 @default.
- W1994090728 cites W2084453501 @default.
- W1994090728 cites W2085856364 @default.
- W1994090728 cites W2087363765 @default.
- W1994090728 cites W2090654059 @default.
- W1994090728 cites W2096405436 @default.
- W1994090728 cites W2099634981 @default.
- W1994090728 cites W2104311964 @default.
- W1994090728 cites W2114013994 @default.
- W1994090728 cites W2116357047 @default.
- W1994090728 cites W2124113789 @default.
- W1994090728 cites W2158675830 @default.
- W1994090728 cites W2158896500 @default.
- W1994090728 cites W2162182094 @default.
- W1994090728 cites W2162533706 @default.
- W1994090728 cites W2164385251 @default.
- W1994090728 cites W2165091983 @default.
- W1994090728 cites W2278193607 @default.
- W1994090728 cites W4256290703 @default.
- W1994090728 cites W580406644 @default.
- W1994090728 doi "https://doi.org/10.1109/jmems.2006.889535" @default.
- W1994090728 hasPublicationYear "2007" @default.
- W1994090728 type Work @default.
- W1994090728 sameAs 1994090728 @default.
- W1994090728 citedByCount "8" @default.
- W1994090728 countsByYear W19940907282012 @default.
- W1994090728 countsByYear W19940907282013 @default.
- W1994090728 countsByYear W19940907282014 @default.
- W1994090728 countsByYear W19940907282015 @default.
- W1994090728 countsByYear W19940907282022 @default.
- W1994090728 crossrefType "journal-article" @default.
- W1994090728 hasAuthorship W1994090728A5004436715 @default.
- W1994090728 hasAuthorship W1994090728A5067677610 @default.
- W1994090728 hasAuthorship W1994090728A5087548475 @default.
- W1994090728 hasConcept C133495861 @default.
- W1994090728 hasConcept C159985019 @default.
- W1994090728 hasConcept C170029824 @default.
- W1994090728 hasConcept C192562407 @default.
- W1994090728 hasConcept C193867417 @default.
- W1994090728 hasConcept C202374169 @default.
- W1994090728 hasConcept C2777922577 @default.
- W1994090728 hasConcept C37977207 @default.
- W1994090728 hasConcept C49040817 @default.
- W1994090728 hasConcept C521977710 @default.
- W1994090728 hasConcept C97126364 @default.
- W1994090728 hasConceptScore W1994090728C133495861 @default.
- W1994090728 hasConceptScore W1994090728C159985019 @default.
- W1994090728 hasConceptScore W1994090728C170029824 @default.
- W1994090728 hasConceptScore W1994090728C192562407 @default.
- W1994090728 hasConceptScore W1994090728C193867417 @default.
- W1994090728 hasConceptScore W1994090728C202374169 @default.
- W1994090728 hasConceptScore W1994090728C2777922577 @default.
- W1994090728 hasConceptScore W1994090728C37977207 @default.
- W1994090728 hasConceptScore W1994090728C49040817 @default.
- W1994090728 hasConceptScore W1994090728C521977710 @default.
- W1994090728 hasConceptScore W1994090728C97126364 @default.
- W1994090728 hasIssue "2" @default.
- W1994090728 hasLocation W19940907281 @default.
- W1994090728 hasOpenAccess W1994090728 @default.
- W1994090728 hasPrimaryLocation W19940907281 @default.
- W1994090728 hasRelatedWork W1523847057 @default.
- W1994090728 hasRelatedWork W1979591188 @default.
- W1994090728 hasRelatedWork W2011411333 @default.
- W1994090728 hasRelatedWork W2078620962 @default.
- W1994090728 hasRelatedWork W2087999094 @default.
- W1994090728 hasRelatedWork W2317083914 @default.
- W1994090728 hasRelatedWork W2389731263 @default.
- W1994090728 hasRelatedWork W2893278809 @default.
- W1994090728 hasRelatedWork W2954843042 @default.
- W1994090728 hasRelatedWork W2463824739 @default.
- W1994090728 hasVolume "16" @default.
- W1994090728 isParatext "false" @default.