Matches in SemOpenAlex for { <https://semopenalex.org/work/W1994156638> ?p ?o ?g. }
- W1994156638 endingPage "126" @default.
- W1994156638 startingPage "91" @default.
- W1994156638 abstract "The preparation of thin films by physical vapour deposition methods is described. At first the different processes for the ejection of particles into vacuum and the characteristic properties of the particles (ionization degree, kinetic energy etc.) are discussed. The influence of the growth parameters on the initial growth and the growth after coalescence is reported. The interrelations are illustrated by experimental findings and computer simulations." @default.
- W1994156638 created "2016-06-24" @default.
- W1994156638 creator A5085780627 @default.
- W1994156638 creator A5089963094 @default.
- W1994156638 date "1990-10-01" @default.
- W1994156638 modified "2023-10-11" @default.
- W1994156638 title "The preparation of thin films by physical vapour deposition methods" @default.
- W1994156638 cites W1491800866 @default.
- W1994156638 cites W1575332366 @default.
- W1994156638 cites W1967305569 @default.
- W1994156638 cites W1974223745 @default.
- W1994156638 cites W1976109672 @default.
- W1994156638 cites W1980216138 @default.
- W1994156638 cites W1981554517 @default.
- W1994156638 cites W1982407262 @default.
- W1994156638 cites W1984807393 @default.
- W1994156638 cites W1988512648 @default.
- W1994156638 cites W1992051023 @default.
- W1994156638 cites W1992600761 @default.
- W1994156638 cites W1998815101 @default.
- W1994156638 cites W2004554003 @default.
- W1994156638 cites W2006190036 @default.
- W1994156638 cites W2006999903 @default.
- W1994156638 cites W2009870510 @default.
- W1994156638 cites W2010636326 @default.
- W1994156638 cites W2011904262 @default.
- W1994156638 cites W2013028068 @default.
- W1994156638 cites W2015806294 @default.
- W1994156638 cites W2020901839 @default.
- W1994156638 cites W2028108032 @default.
- W1994156638 cites W2040179900 @default.
- W1994156638 cites W2041422322 @default.
- W1994156638 cites W2042849290 @default.
- W1994156638 cites W2045404641 @default.
- W1994156638 cites W2047963746 @default.
- W1994156638 cites W2050350012 @default.
- W1994156638 cites W2052089016 @default.
- W1994156638 cites W2055606813 @default.
- W1994156638 cites W2067506905 @default.
- W1994156638 cites W2073472514 @default.
- W1994156638 cites W2076055710 @default.
- W1994156638 cites W2077550363 @default.
- W1994156638 cites W2079289299 @default.
- W1994156638 cites W2091177323 @default.
- W1994156638 cites W2093360760 @default.
- W1994156638 cites W2093952707 @default.
- W1994156638 cites W2101709141 @default.
- W1994156638 cites W2162701325 @default.
- W1994156638 cites W3021677097 @default.
- W1994156638 doi "https://doi.org/10.1016/0040-6090(90)90277-k" @default.
- W1994156638 hasPublicationYear "1990" @default.
- W1994156638 type Work @default.
- W1994156638 sameAs 1994156638 @default.
- W1994156638 citedByCount "213" @default.
- W1994156638 countsByYear W19941566382012 @default.
- W1994156638 countsByYear W19941566382013 @default.
- W1994156638 countsByYear W19941566382014 @default.
- W1994156638 countsByYear W19941566382015 @default.
- W1994156638 countsByYear W19941566382016 @default.
- W1994156638 countsByYear W19941566382017 @default.
- W1994156638 countsByYear W19941566382018 @default.
- W1994156638 countsByYear W19941566382019 @default.
- W1994156638 countsByYear W19941566382020 @default.
- W1994156638 countsByYear W19941566382021 @default.
- W1994156638 countsByYear W19941566382022 @default.
- W1994156638 countsByYear W19941566382023 @default.
- W1994156638 crossrefType "journal-article" @default.
- W1994156638 hasAuthorship W1994156638A5085780627 @default.
- W1994156638 hasAuthorship W1994156638A5089963094 @default.
- W1994156638 hasConcept C121332964 @default.
- W1994156638 hasConcept C127413603 @default.
- W1994156638 hasConcept C135889238 @default.
- W1994156638 hasConcept C145148216 @default.
- W1994156638 hasConcept C149792144 @default.
- W1994156638 hasConcept C151730666 @default.
- W1994156638 hasConcept C159467904 @default.
- W1994156638 hasConcept C171250308 @default.
- W1994156638 hasConcept C178790620 @default.
- W1994156638 hasConcept C185592680 @default.
- W1994156638 hasConcept C19067145 @default.
- W1994156638 hasConcept C192562407 @default.
- W1994156638 hasConcept C198291218 @default.
- W1994156638 hasConcept C2776873873 @default.
- W1994156638 hasConcept C2816523 @default.
- W1994156638 hasConcept C2986596850 @default.
- W1994156638 hasConcept C42360764 @default.
- W1994156638 hasConcept C51576277 @default.
- W1994156638 hasConcept C57410435 @default.
- W1994156638 hasConcept C64297162 @default.
- W1994156638 hasConcept C74650414 @default.
- W1994156638 hasConcept C86803240 @default.
- W1994156638 hasConcept C87355193 @default.
- W1994156638 hasConceptScore W1994156638C121332964 @default.
- W1994156638 hasConceptScore W1994156638C127413603 @default.
- W1994156638 hasConceptScore W1994156638C135889238 @default.
- W1994156638 hasConceptScore W1994156638C145148216 @default.
- W1994156638 hasConceptScore W1994156638C149792144 @default.
- W1994156638 hasConceptScore W1994156638C151730666 @default.