Matches in SemOpenAlex for { <https://semopenalex.org/work/W1994172907> ?p ?o ?g. }
- W1994172907 endingPage "385102" @default.
- W1994172907 startingPage "385102" @default.
- W1994172907 abstract "We demonstrate that by using a water (H2O)-based thermal atomic layer deposited (ALD) aluminum oxide (Al2O3) film, excellent surface passivation can be attained on planar low-resistivity silicon wafers. Effective carrier lifetime values of up to 12 ms and surface recombination velocities as low as 0.33 cm s−1 are achieved on float-zone wafers after a post-deposition thermal activation of the Al2O3 passivation layer. This post-deposition activation is achieved using an industrial high-temperature firing process which is commonly used for contact formation of standard screen-printed silicon solar cells. Neither a low-temperature post-deposition anneal nor a silicon nitride capping layer is required in this case. Deposition temperatures in the 100–400 °C range and peak firing temperatures of about 800 °C (set temperature) are investigated. Photoluminescence imaging shows that the surface passivation is laterally uniform. Corona charging and capacitance–voltage measurements reveal that the negative fixed charge density near the AlOx/c-Si interface increases from 1.4 × 1012 to 3.3 × 1012 cm−2 due to firing, while the midgap interface defect density reduces from 3.3 × 1011 to 0.8 × 1011 cm−2 eV−1. This work demonstrates that direct firing activation of thermal ALD Al2O3 is feasible, which could be beneficial for solar cell manufacturing." @default.
- W1994172907 created "2016-06-24" @default.
- W1994172907 creator A5007315209 @default.
- W1994172907 creator A5012113227 @default.
- W1994172907 creator A5052117860 @default.
- W1994172907 creator A5057345780 @default.
- W1994172907 creator A5074931673 @default.
- W1994172907 creator A5082502942 @default.
- W1994172907 creator A5088255570 @default.
- W1994172907 date "2013-09-04" @default.
- W1994172907 modified "2023-10-09" @default.
- W1994172907 title "Excellent<i>c</i>-Si surface passivation by thermal atomic layer deposited aluminum oxide after industrial firing activation" @default.
- W1994172907 cites W1602443919 @default.
- W1994172907 cites W1614326934 @default.
- W1994172907 cites W1614676509 @default.
- W1994172907 cites W1653224167 @default.
- W1994172907 cites W1655635229 @default.
- W1994172907 cites W1885836091 @default.
- W1994172907 cites W1966497072 @default.
- W1994172907 cites W1971387357 @default.
- W1994172907 cites W1979645322 @default.
- W1994172907 cites W1994653731 @default.
- W1994172907 cites W1995045781 @default.
- W1994172907 cites W2004423132 @default.
- W1994172907 cites W2008860786 @default.
- W1994172907 cites W2019267643 @default.
- W1994172907 cites W2020917858 @default.
- W1994172907 cites W2021192341 @default.
- W1994172907 cites W2026655406 @default.
- W1994172907 cites W2035492164 @default.
- W1994172907 cites W2043888845 @default.
- W1994172907 cites W2045653839 @default.
- W1994172907 cites W2052887220 @default.
- W1994172907 cites W2058579930 @default.
- W1994172907 cites W2063270547 @default.
- W1994172907 cites W2063363560 @default.
- W1994172907 cites W2075343701 @default.
- W1994172907 cites W2075783412 @default.
- W1994172907 cites W2077809990 @default.
- W1994172907 cites W2079471989 @default.
- W1994172907 cites W2085293113 @default.
- W1994172907 cites W2090102792 @default.
- W1994172907 cites W2093016502 @default.
- W1994172907 cites W2099559574 @default.
- W1994172907 cites W2107054201 @default.
- W1994172907 cites W2119758120 @default.
- W1994172907 cites W2126664527 @default.
- W1994172907 cites W2138008808 @default.
- W1994172907 cites W2139180413 @default.
- W1994172907 cites W2154027555 @default.
- W1994172907 cites W2158932701 @default.
- W1994172907 cites W2221468804 @default.
- W1994172907 cites W2318085085 @default.
- W1994172907 cites W2470357878 @default.
- W1994172907 doi "https://doi.org/10.1088/0022-3727/46/38/385102" @default.
- W1994172907 hasPublicationYear "2013" @default.
- W1994172907 type Work @default.
- W1994172907 sameAs 1994172907 @default.
- W1994172907 citedByCount "20" @default.
- W1994172907 countsByYear W19941729072014 @default.
- W1994172907 countsByYear W19941729072015 @default.
- W1994172907 countsByYear W19941729072016 @default.
- W1994172907 countsByYear W19941729072017 @default.
- W1994172907 countsByYear W19941729072018 @default.
- W1994172907 countsByYear W19941729072019 @default.
- W1994172907 countsByYear W19941729072020 @default.
- W1994172907 countsByYear W19941729072021 @default.
- W1994172907 countsByYear W19941729072022 @default.
- W1994172907 crossrefType "journal-article" @default.
- W1994172907 hasAuthorship W1994172907A5007315209 @default.
- W1994172907 hasAuthorship W1994172907A5012113227 @default.
- W1994172907 hasAuthorship W1994172907A5052117860 @default.
- W1994172907 hasAuthorship W1994172907A5057345780 @default.
- W1994172907 hasAuthorship W1994172907A5074931673 @default.
- W1994172907 hasAuthorship W1994172907A5082502942 @default.
- W1994172907 hasAuthorship W1994172907A5088255570 @default.
- W1994172907 hasConcept C121332964 @default.
- W1994172907 hasConcept C127413603 @default.
- W1994172907 hasConcept C153294291 @default.
- W1994172907 hasConcept C159985019 @default.
- W1994172907 hasConcept C191897082 @default.
- W1994172907 hasConcept C192562407 @default.
- W1994172907 hasConcept C204530211 @default.
- W1994172907 hasConcept C2777047311 @default.
- W1994172907 hasConcept C2779227376 @default.
- W1994172907 hasConcept C2779851234 @default.
- W1994172907 hasConcept C2910700394 @default.
- W1994172907 hasConcept C33574316 @default.
- W1994172907 hasConcept C42360764 @default.
- W1994172907 hasConcept C513153333 @default.
- W1994172907 hasConcept C69544855 @default.
- W1994172907 hasConceptScore W1994172907C121332964 @default.
- W1994172907 hasConceptScore W1994172907C127413603 @default.
- W1994172907 hasConceptScore W1994172907C153294291 @default.
- W1994172907 hasConceptScore W1994172907C159985019 @default.
- W1994172907 hasConceptScore W1994172907C191897082 @default.
- W1994172907 hasConceptScore W1994172907C192562407 @default.
- W1994172907 hasConceptScore W1994172907C204530211 @default.