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W1994229962 endingPage "83" @default.
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W1994229962 abstract "Considerable price reduction with respect to currently available sensors can be reached by industrial production of an integrated fully compensated sensor. A compatible process for simultaneous fabrication of sensors and IC was developed, starting from a standard 20 V bipolar process and from an original process for piezoresistive pressure sensors. A first approach of total integration of sensing element, amplifier and temperature compensation circuitry for an 8-bar differential pressure sensor in an automotive package was realised on a hybrid. The test included both electrical and environmental measurements. The results obtained with these devices show the feasability of integrating on the same chip the sensor and the output signal conditioning." @default.
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W1994229962 date "1990-02-01" @default.
W1994229962 modified "2023-10-01" @default.
W1994229962 title "Cooperative development of a piezoresistive pressure sensor with integrated signal conditioning for automotive and industrial applications" @default.
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W1994229962 doi "https://doi.org/10.1016/0924-4247(90)85016-w" @default.
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