FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1994300145> ?p ?o ?g. }

• W1994300145 endingPage "585" @default.
• W1994300145 startingPage "585" @default.
• W1994300145 abstract "The SiH 3 radical density in pulsed silane discharge plasma was measured by infrared diode laser absorption spectroscopy (IRLAS) for three buffer gases and also as functions of the sample pressure and the pulse width. They were compared with the SiH and SiH 2 radical densities. The growth rate of a-Si:H thin film was compared with the SiH 3 radical density on various plasma conditions. These data were employed to discuss the contribution of SiH 3 to a-Si:H thin-film growth." @default.
• W1994300145 created "2016-06-24" @default.
• W1994300145 creator A5003062655 @default.
• W1994300145 creator A5005997243 @default.
• W1994300145 creator A5011656901 @default.
• W1994300145 creator A5055652136 @default.
• W1994300145 creator A5057233958 @default.
• W1994300145 creator A5060233639 @default.
• W1994300145 creator A5089267001 @default.
• W1994300145 date "1990-03-01" @default.
• W1994300145 modified "2023-10-09" @default.
• W1994300145 title "SiH₃ Radical Density in Pulsed Silane Plasma" @default.
• W1994300145 cites W1967263968 @default.
• W1994300145 cites W1971122264 @default.
• W1994300145 cites W1992902787 @default.
• W1994300145 cites W1995116358 @default.
• W1994300145 cites W1997278038 @default.
• W1994300145 cites W2003397929 @default.
• W1994300145 cites W2010377407 @default.
• W1994300145 cites W2012290598 @default.
• W1994300145 cites W2014206557 @default.
• W1994300145 cites W2026882554 @default.
• W1994300145 cites W2035663297 @default.
• W1994300145 cites W2041378425 @default.
• W1994300145 cites W2049812380 @default.
• W1994300145 cites W2050983849 @default.
• W1994300145 cites W2054863638 @default.
• W1994300145 cites W2067913055 @default.
• W1994300145 cites W2077565177 @default.
• W1994300145 cites W2077592843 @default.
• W1994300145 cites W2080356884 @default.
• W1994300145 cites W2126241255 @default.
• W1994300145 doi "https://doi.org/10.1143/jjap.29.585" @default.
• W1994300145 hasPublicationYear "1990" @default.
• W1994300145 type Work @default.
• W1994300145 sameAs 1994300145 @default.
• W1994300145 citedByCount "48" @default.
• W1994300145 countsByYear W19943001452013 @default.
• W1994300145 countsByYear W19943001452014 @default.
• W1994300145 countsByYear W19943001452015 @default.
• W1994300145 countsByYear W19943001452016 @default.
• W1994300145 countsByYear W19943001452017 @default.
• W1994300145 countsByYear W19943001452019 @default.
• W1994300145 countsByYear W19943001452021 @default.
• W1994300145 countsByYear W19943001452022 @default.
• W1994300145 crossrefType "journal-article" @default.
• W1994300145 hasAuthorship W1994300145A5003062655 @default.
• W1994300145 hasAuthorship W1994300145A5005997243 @default.
• W1994300145 hasAuthorship W1994300145A5011656901 @default.
• W1994300145 hasAuthorship W1994300145A5055652136 @default.
• W1994300145 hasAuthorship W1994300145A5057233958 @default.
• W1994300145 hasAuthorship W1994300145A5060233639 @default.
• W1994300145 hasAuthorship W1994300145A5089267001 @default.
• W1994300145 hasConcept C113196181 @default.
• W1994300145 hasConcept C119824511 @default.
• W1994300145 hasConcept C120665830 @default.
• W1994300145 hasConcept C121332964 @default.
• W1994300145 hasConcept C153642686 @default.
• W1994300145 hasConcept C158355884 @default.
• W1994300145 hasConcept C171250308 @default.
• W1994300145 hasConcept C178790620 @default.
• W1994300145 hasConcept C185592680 @default.
• W1994300145 hasConcept C19067145 @default.
• W1994300145 hasConcept C192562407 @default.
• W1994300145 hasConcept C2778024649 @default.
• W1994300145 hasConcept C43617362 @default.
• W1994300145 hasConcept C49040817 @default.
• W1994300145 hasConcept C62520636 @default.
• W1994300145 hasConcept C78434282 @default.
• W1994300145 hasConcept C82706917 @default.
• W1994300145 hasConceptScore W1994300145C113196181 @default.
• W1994300145 hasConceptScore W1994300145C119824511 @default.
• W1994300145 hasConceptScore W1994300145C120665830 @default.
• W1994300145 hasConceptScore W1994300145C121332964 @default.
• W1994300145 hasConceptScore W1994300145C153642686 @default.
• W1994300145 hasConceptScore W1994300145C158355884 @default.
• W1994300145 hasConceptScore W1994300145C171250308 @default.
• W1994300145 hasConceptScore W1994300145C178790620 @default.
• W1994300145 hasConceptScore W1994300145C185592680 @default.
• W1994300145 hasConceptScore W1994300145C19067145 @default.
• W1994300145 hasConceptScore W1994300145C192562407 @default.
• W1994300145 hasConceptScore W1994300145C2778024649 @default.
• W1994300145 hasConceptScore W1994300145C43617362 @default.
• W1994300145 hasConceptScore W1994300145C49040817 @default.
• W1994300145 hasConceptScore W1994300145C62520636 @default.
• W1994300145 hasConceptScore W1994300145C78434282 @default.
• W1994300145 hasConceptScore W1994300145C82706917 @default.
• W1994300145 hasIssue "3R" @default.
• W1994300145 hasLocation W19943001451 @default.
• W1994300145 hasOpenAccess W1994300145 @default.
• W1994300145 hasPrimaryLocation W19943001451 @default.
• W1994300145 hasRelatedWork W117824151 @default.
• W1994300145 hasRelatedWork W1982027788 @default.
• W1994300145 hasRelatedWork W2008512696 @default.
• W1994300145 hasRelatedWork W2018674345 @default.
• W1994300145 hasRelatedWork W2135375667 @default.
• W1994300145 hasRelatedWork W2469340274 @default.
• W1994300145 hasRelatedWork W2916853706 @default.

• next