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- W1994301653 abstract "The results of x-ray lithography using the synchrotron radiation of the storage ring, SOR-ring, at an electron energy of 0.3 GEV are studied. AIP" @default.
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- W1994301653 date "1979-11-01" @default.
- W1994301653 modified "2023-09-26" @default.
- W1994301653 title "X‐ray lithography by synchrotron radiation of the SOR‐RING storage ring" @default.
- W1994301653 doi "https://doi.org/10.1116/1.570359" @default.
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