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- W1994315418 abstract "Abstract Electromigration (EM) is one of the major concerns for the development of ULSI divices, but not all the aspects of the phenomenon are presently well understood. In this paper well established results and unsolved problems are reviewed and discussed. First, the physical model and in particular the influence of the mechanical stress on EM is considered. Then, the various techniques used to characterize electromigration are analyzed, making distinction between traditional techniques (median time to failure technique and resistometric methods) and more recently developed methods (high-resolution resistometric techniques and low-frequency noise measurement), also considering the fast techniques used for metallisation testing in the industrial environment. Finally, a section is devoted to the problem of test-structure and test-procedure standardisation in EM experiments." @default.
- W1994315418 created "2016-06-24" @default.
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- W1994315418 creator A5020986556 @default.
- W1994315418 creator A5082282613 @default.
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- W1994315418 date "1993-09-01" @default.
- W1994315418 modified "2023-10-16" @default.
- W1994315418 title "Electromigration in thin-films for microelectronics" @default.
- W1994315418 cites W1577848811 @default.
- W1994315418 cites W1965416341 @default.
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- W1994315418 cites W1970620742 @default.
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- W1994315418 cites W1978714009 @default.
- W1994315418 cites W1980946693 @default.
- W1994315418 cites W1982618580 @default.
- W1994315418 cites W1984007404 @default.
- W1994315418 cites W1987783318 @default.
- W1994315418 cites W1996215822 @default.
- W1994315418 cites W1996327192 @default.
- W1994315418 cites W1997879436 @default.
- W1994315418 cites W2002003312 @default.
- W1994315418 cites W2004712986 @default.
- W1994315418 cites W2005643096 @default.
- W1994315418 cites W2006632371 @default.
- W1994315418 cites W2006976519 @default.
- W1994315418 cites W2007740395 @default.
- W1994315418 cites W2009613072 @default.
- W1994315418 cites W2012489289 @default.
- W1994315418 cites W2014426329 @default.
- W1994315418 cites W2014909100 @default.
- W1994315418 cites W2014979124 @default.
- W1994315418 cites W2015292573 @default.
- W1994315418 cites W2025060723 @default.
- W1994315418 cites W2028679945 @default.
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- W1994315418 cites W2030037213 @default.
- W1994315418 cites W2038271035 @default.
- W1994315418 cites W2043180652 @default.
- W1994315418 cites W2047118621 @default.
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- W1994315418 cites W2051336010 @default.
- W1994315418 cites W2053524914 @default.
- W1994315418 cites W2055619489 @default.
- W1994315418 cites W2058315012 @default.
- W1994315418 cites W2062089850 @default.
- W1994315418 cites W2063218992 @default.
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- W1994315418 cites W2084900767 @default.
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- W1994315418 cites W2092792429 @default.
- W1994315418 cites W2094244525 @default.
- W1994315418 cites W2095263067 @default.
- W1994315418 cites W2095470180 @default.
- W1994315418 cites W2095529398 @default.
- W1994315418 cites W2103757453 @default.
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- W1994315418 doi "https://doi.org/10.1016/0026-2714(93)90086-e" @default.
- W1994315418 hasPublicationYear "1993" @default.
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