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- W1994388664 abstract "This paper describes the design of a proximity effect test structure and electrical test method for estimating the magnitude of proximity effects in electron‐beam lithography. The test structure consists of a van der Pauw cross resistor for measuring sheet resistance, a bridge resistor for measuring electrical linewidth, and a second bridge resistor simulating a close line‐space environment for measuring electrical linewidth where proximity exposure effects from nearby patterns may be encountered. In this experiment, test structures were delineated in aluminum on silicon wafers using electron‐beam exposure and wet chemical etching. Electrical measurements from these test structures are compared to optical measurements to verify the measurement method. In addition, results from the test structures are used to estimate the parameters for the gaussian model commonly used for proximity correction." @default.
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- W1994388664 date "1985-07-01" @default.
- W1994388664 modified "2023-09-25" @default.
- W1994388664 title "An Electrical Test Structure for Proximity Effects Measurement and Correction" @default.
- W1994388664 doi "https://doi.org/10.1149/1.2114200" @default.
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