Matches in SemOpenAlex for { <https://semopenalex.org/work/W1994481720> ?p ?o ?g. }
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- W1994481720 endingPage "4153" @default.
- W1994481720 startingPage "4147" @default.
- W1994481720 abstract "The evaluation and structural optimization of a family of single layer, positive tone, chemically amplified resists for 193-nm lithography is presented. The resists are formulated from cyclopolymeric materials in which the nature, etch properties, and spatial disposition of the substituents are systematically varied. Their lithographic performance is evaluated on the basis of the interplay between chemical structure, molecular weight, and comonomer composition. These materials have good optical clarity at the desired wavelength, excellent resolution to ca. 90 nm with a phase-shifting mask, and outstanding reactive ion etch resistance." @default.
- W1994481720 created "2016-06-24" @default.
- W1994481720 creator A5002152167 @default.
- W1994481720 creator A5006237410 @default.
- W1994481720 creator A5027381116 @default.
- W1994481720 creator A5035923317 @default.
- W1994481720 creator A5059981404 @default.
- W1994481720 date "2001-10-09" @default.
- W1994481720 modified "2023-09-23" @default.
- W1994481720 title "Microlithographic Assessment of a Novel Family of Transparent and Etch-Resistant Chemically Amplified 193-nm Resists Based on Cyclopolymers" @default.
- W1994481720 cites W1992096081 @default.
- W1994481720 cites W1995528667 @default.
- W1994481720 cites W1998863009 @default.
- W1994481720 cites W2001565177 @default.
- W1994481720 cites W2011481058 @default.
- W1994481720 cites W2025535879 @default.
- W1994481720 cites W2033163986 @default.
- W1994481720 cites W2033528617 @default.
- W1994481720 cites W2049704453 @default.
- W1994481720 cites W2063334744 @default.
- W1994481720 cites W2074223027 @default.
- W1994481720 cites W2074784262 @default.
- W1994481720 cites W2081852577 @default.
- W1994481720 cites W2087233928 @default.
- W1994481720 cites W2145930691 @default.
- W1994481720 cites W2164592037 @default.
- W1994481720 cites W2949732692 @default.
- W1994481720 cites W4236102394 @default.
- W1994481720 doi "https://doi.org/10.1021/cm010431w" @default.
- W1994481720 hasPublicationYear "2001" @default.
- W1994481720 type Work @default.
- W1994481720 sameAs 1994481720 @default.
- W1994481720 citedByCount "37" @default.
- W1994481720 countsByYear W19944817202012 @default.
- W1994481720 countsByYear W19944817202013 @default.
- W1994481720 countsByYear W19944817202015 @default.
- W1994481720 countsByYear W19944817202016 @default.
- W1994481720 countsByYear W19944817202017 @default.
- W1994481720 countsByYear W19944817202018 @default.
- W1994481720 countsByYear W19944817202019 @default.
- W1994481720 countsByYear W19944817202020 @default.
- W1994481720 countsByYear W19944817202021 @default.
- W1994481720 countsByYear W19944817202022 @default.
- W1994481720 countsByYear W19944817202023 @default.
- W1994481720 crossrefType "journal-article" @default.
- W1994481720 hasAuthorship W1994481720A5002152167 @default.
- W1994481720 hasAuthorship W1994481720A5006237410 @default.
- W1994481720 hasAuthorship W1994481720A5027381116 @default.
- W1994481720 hasAuthorship W1994481720A5035923317 @default.
- W1994481720 hasAuthorship W1994481720A5059981404 @default.
- W1994481720 hasConcept C105487726 @default.
- W1994481720 hasConcept C159985019 @default.
- W1994481720 hasConcept C166940927 @default.
- W1994481720 hasConcept C171250308 @default.
- W1994481720 hasConcept C192562407 @default.
- W1994481720 hasConcept C204223013 @default.
- W1994481720 hasConcept C2779227376 @default.
- W1994481720 hasConcept C2780672802 @default.
- W1994481720 hasConcept C49040817 @default.
- W1994481720 hasConcept C521977710 @default.
- W1994481720 hasConcept C53524968 @default.
- W1994481720 hasConceptScore W1994481720C105487726 @default.
- W1994481720 hasConceptScore W1994481720C159985019 @default.
- W1994481720 hasConceptScore W1994481720C166940927 @default.
- W1994481720 hasConceptScore W1994481720C171250308 @default.
- W1994481720 hasConceptScore W1994481720C192562407 @default.
- W1994481720 hasConceptScore W1994481720C204223013 @default.
- W1994481720 hasConceptScore W1994481720C2779227376 @default.
- W1994481720 hasConceptScore W1994481720C2780672802 @default.
- W1994481720 hasConceptScore W1994481720C49040817 @default.
- W1994481720 hasConceptScore W1994481720C521977710 @default.
- W1994481720 hasConceptScore W1994481720C53524968 @default.
- W1994481720 hasIssue "11" @default.
- W1994481720 hasLocation W19944817201 @default.
- W1994481720 hasOpenAccess W1994481720 @default.
- W1994481720 hasPrimaryLocation W19944817201 @default.
- W1994481720 hasRelatedWork W178758932 @default.
- W1994481720 hasRelatedWork W2005993612 @default.
- W1994481720 hasRelatedWork W2007023140 @default.
- W1994481720 hasRelatedWork W2023999549 @default.
- W1994481720 hasRelatedWork W2046729892 @default.
- W1994481720 hasRelatedWork W2063218666 @default.
- W1994481720 hasRelatedWork W2070952328 @default.
- W1994481720 hasRelatedWork W2332072138 @default.
- W1994481720 hasRelatedWork W3007549791 @default.
- W1994481720 hasRelatedWork W4246238382 @default.
- W1994481720 hasVolume "13" @default.
- W1994481720 isParatext "false" @default.
- W1994481720 isRetracted "false" @default.
- W1994481720 magId "1994481720" @default.
- W1994481720 workType "article" @default.