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- W1994582457 abstract "Imprinted molds which are contaminated by organic substances such as UV-resins through many times of imprinting processes are successfully cleaned with irradiation of a vacuum ultraviolet (VUV, λ = 172 nm) light. Substrate temperature, radiation distance, and ambient oxygen concentration are also revealed as important factors to clean the molds." @default.
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- W1994582457 date "2010-12-01" @default.
- W1994582457 modified "2023-09-23" @default.
- W1994582457 title "IMPRINT-MOLD-CLEANING BY VACUUM ULTRAVIOLET LIGHT" @default.
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- W1994582457 doi "https://doi.org/10.1142/s0218863510005698" @default.
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