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- W1994643746 abstract "Abstract Advanced 3D finite element analysis of a newly designed piezoelectric micro-mirror device was conducted to assess a priori the attainable deflection of micro-mirror. The deflection of micro-mirror has shown to vary with the competitions and/or cooperative interactions among deposited layers. The device was successfully fabricated using a heteroepitaxial growth process with Pt/PZT(1 1 1)/Pt(1 1 1)/γ-Al 2 O 3 (1 1 1)/Si(1 1 1) structure. Material anisotropy and technologically induced residual stress have shown to play a significant role on the deflection of micro-mirror. A good correlation was found between simulation results and experimentally measured deflection of fabricated micro-mirror." @default.
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- W1994643746 date "2010-11-01" @default.
- W1994643746 modified "2023-09-27" @default.
- W1994643746 title "Characterization of the deflection of a new epitaxial piezoelectric micro-mirror: Modeling and experiment" @default.
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- W1994643746 doi "https://doi.org/10.1016/j.mseb.2010.07.015" @default.
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