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- W1994685453 abstract "Direct engraving of mask patterns in a resist film was tried by exposing with synchrotron radiation. Using a stencil mask made of a Si3N4 substrate, submicron structures could be successfully replicated. Fundamental aspects of resist decomposition by synchrotron radiation were also investigated by mass and electron spectroscopy." @default.
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- W1994685453 date "1983-10-01" @default.
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- W1994685453 title "Direct engraving on positive resists by synchrotron radiation" @default.
- W1994685453 doi "https://doi.org/10.1116/1.582636" @default.
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