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- W1994846906 abstract "The authors calculate the rate at which a target located at the cathode of a glow discharge is sputtered. The calculation involves two steps: (1) evaluation of the energy distribution functions of ions and neutrals impinging on the target; and (2) convolution of these distributions with known sputtering functions. They show that under certain conditions, charge-exchange collisions lead to sputtering predominantly by fast neutrals." @default.
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- W1994846906 date "1984-09-14" @default.
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- W1994846906 title "The contribution of fast neutrals to cathode erosion in glow discharges" @default.
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- W1994846906 doi "https://doi.org/10.1088/0022-3727/17/9/009" @default.
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