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• W1994865736 abstract "Anodic aluminum oxide (AAO) was used as substrates of microstructure fabrication. Complex structures with high aspect ratios were obtained by the single-step wet etching of the AAO substrates. Structures with different shapes and aspect ratios could be simultaneously obtained with vertical sidewalls. The surface morphology of the fabricated structures could be tailored. It is expected that various MEMS/NEMS devices can be built using this technique." @default.
• W1994865736 created "2016-06-24" @default.
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• W1994865736 date "2005-07-13" @default.
• W1994865736 modified "2023-10-14" @default.
• W1994865736 title "Fabrication of Microstructures by Wet Etching of Anodic Aluminum Oxide Substrates" @default.
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• W1994865736 doi "https://doi.org/10.1021/cm0486565" @default.
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