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- W1994893200 endingPage "S33" @default.
- W1994893200 startingPage "S23" @default.
- W1994893200 abstract "Optical techniques which were developed for ex situ characterization of static displacements, motions, vibrations and internal strain of micromechanical devices and M(O)EMS are critically reviewed. Their performances and limitations are analysed and improvements which were proposed recently and which are still needed are discussed. It is shown that many optical techniques are available for 1D, 2D or 3D out-of-plane measurements with a lateral resolution in the (sub)micron range, a vertical resolution in the (sub)nanometer range and a frequency range up to a few MHz or more. In contrast, only very few techniques are suitable for in-plane, on wafer or in vacuum measurements." @default.
- W1994893200 created "2016-06-24" @default.
- W1994893200 creator A5029635292 @default.
- W1994893200 creator A5070489803 @default.
- W1994893200 date "2003-06-13" @default.
- W1994893200 modified "2023-10-16" @default.
- W1994893200 title "Characterization of the static and dynamic behaviour of M(O)EMS by optical techniques: status and trends" @default.
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- W1994893200 doi "https://doi.org/10.1088/0960-1317/13/4/304" @default.
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