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- W1994912880 abstract "Crystal tilts in epitaxially laterally overgrown (ELO) GaN films via hydride vapour phase epitaxy (HVPE) on sapphire substrates have been investigated by using the four-circle x-ray diffraction method. Three diffraction peaks corresponding to the (0002) reflection of vertically epitaxial and tilted GaN domains are observable in the x-ray rocking curve. The angle separations Δω between the main peak and two lobes change with the azimuth angle ϕ. The dependence of Δω on ϕ and the crystal tilt angle θ has been calculated based on the standard kinetic x-ray diffraction model. The crystal tilt angle of a typical HVPE ELO GaN sample has been determined to be 2.379°." @default.
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- W1994912880 date "2001-05-03" @default.
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- W1994912880 title "Crystal Tilts in Epitaxially Laterally Overgrown GaN Films Determined by Four-Circle X-Ray Diffraction" @default.
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- W1994912880 doi "https://doi.org/10.1088/0256-307x/18/6/334" @default.
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