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- W1994992047 abstract "Photochemical (PC) etching of n-InP using an Ar/sup +/ laser and dilute phosphoric acid solutions was studied as a function of temperature, power, illumination frequency, and duty cycle. The process was found to be reaction-rate limited with an activation energy >or=0.34 eV. The photo-etch rate, i.e. the etch rate divided by the fraction of time the Ar/sup +/ light is on, was found to be a function of the illumination duty cycle but not the chopping frequency in the range 100-3200 Hz. These results are explained on the basis of a rate equation model for material removal. An application for PC etching is presented in which n-InP wafers 35-200- mu m thick were prepared for observation in the transmission electron microscope. >" @default.
- W1994992047 created "2016-06-24" @default.
- W1994992047 creator A5076408335 @default.
- W1994992047 creator A5079598910 @default.
- W1994992047 date "1990-01-01" @default.
- W1994992047 modified "2023-09-25" @default.
- W1994992047 title "Photochemical etching of n-InP: temperature, power and frequency studies" @default.
- W1994992047 cites W1565227675 @default.
- W1994992047 cites W1966544535 @default.
- W1994992047 cites W2000113459 @default.
- W1994992047 cites W2016167222 @default.
- W1994992047 cites W2021589642 @default.
- W1994992047 cites W2023728755 @default.
- W1994992047 cites W2052618967 @default.
- W1994992047 cites W2061240069 @default.
- W1994992047 cites W2100195491 @default.
- W1994992047 cites W2210135655 @default.
- W1994992047 doi "https://doi.org/10.1109/iciprm.1990.203017" @default.
- W1994992047 hasPublicationYear "1990" @default.
- W1994992047 type Work @default.
- W1994992047 sameAs 1994992047 @default.
- W1994992047 citedByCount "0" @default.
- W1994992047 crossrefType "proceedings-article" @default.
- W1994992047 hasAuthorship W1994992047A5076408335 @default.
- W1994992047 hasAuthorship W1994992047A5079598910 @default.
- W1994992047 hasConcept C100460472 @default.
- W1994992047 hasConcept C111163200 @default.
- W1994992047 hasConcept C113196181 @default.
- W1994992047 hasConcept C120665830 @default.
- W1994992047 hasConcept C121332964 @default.
- W1994992047 hasConcept C146088050 @default.
- W1994992047 hasConcept C147789679 @default.
- W1994992047 hasConcept C148898269 @default.
- W1994992047 hasConcept C153294291 @default.
- W1994992047 hasConcept C160671074 @default.
- W1994992047 hasConcept C163258240 @default.
- W1994992047 hasConcept C171250308 @default.
- W1994992047 hasConcept C185592680 @default.
- W1994992047 hasConcept C191897082 @default.
- W1994992047 hasConcept C192562407 @default.
- W1994992047 hasConcept C199822604 @default.
- W1994992047 hasConcept C2776622989 @default.
- W1994992047 hasConcept C2779227376 @default.
- W1994992047 hasConcept C39353612 @default.
- W1994992047 hasConcept C43617362 @default.
- W1994992047 hasConcept C49040817 @default.
- W1994992047 hasConcept C520434653 @default.
- W1994992047 hasConcept C62520636 @default.
- W1994992047 hasConcept C95121573 @default.
- W1994992047 hasConceptScore W1994992047C100460472 @default.
- W1994992047 hasConceptScore W1994992047C111163200 @default.
- W1994992047 hasConceptScore W1994992047C113196181 @default.
- W1994992047 hasConceptScore W1994992047C120665830 @default.
- W1994992047 hasConceptScore W1994992047C121332964 @default.
- W1994992047 hasConceptScore W1994992047C146088050 @default.
- W1994992047 hasConceptScore W1994992047C147789679 @default.
- W1994992047 hasConceptScore W1994992047C148898269 @default.
- W1994992047 hasConceptScore W1994992047C153294291 @default.
- W1994992047 hasConceptScore W1994992047C160671074 @default.
- W1994992047 hasConceptScore W1994992047C163258240 @default.
- W1994992047 hasConceptScore W1994992047C171250308 @default.
- W1994992047 hasConceptScore W1994992047C185592680 @default.
- W1994992047 hasConceptScore W1994992047C191897082 @default.
- W1994992047 hasConceptScore W1994992047C192562407 @default.
- W1994992047 hasConceptScore W1994992047C199822604 @default.
- W1994992047 hasConceptScore W1994992047C2776622989 @default.
- W1994992047 hasConceptScore W1994992047C2779227376 @default.
- W1994992047 hasConceptScore W1994992047C39353612 @default.
- W1994992047 hasConceptScore W1994992047C43617362 @default.
- W1994992047 hasConceptScore W1994992047C49040817 @default.
- W1994992047 hasConceptScore W1994992047C520434653 @default.
- W1994992047 hasConceptScore W1994992047C62520636 @default.
- W1994992047 hasConceptScore W1994992047C95121573 @default.
- W1994992047 hasLocation W19949920471 @default.
- W1994992047 hasOpenAccess W1994992047 @default.
- W1994992047 hasPrimaryLocation W19949920471 @default.
- W1994992047 hasRelatedWork W1970749931 @default.
- W1994992047 hasRelatedWork W1999922101 @default.
- W1994992047 hasRelatedWork W2013178387 @default.
- W1994992047 hasRelatedWork W2029931476 @default.
- W1994992047 hasRelatedWork W2036754195 @default.
- W1994992047 hasRelatedWork W2038701336 @default.
- W1994992047 hasRelatedWork W2041948944 @default.
- W1994992047 hasRelatedWork W2055702928 @default.
- W1994992047 hasRelatedWork W2064669839 @default.
- W1994992047 hasRelatedWork W2070399349 @default.
- W1994992047 hasRelatedWork W2075323434 @default.
- W1994992047 hasRelatedWork W2078047140 @default.
- W1994992047 hasRelatedWork W2151918029 @default.
- W1994992047 hasRelatedWork W2152218374 @default.
- W1994992047 hasRelatedWork W2171720396 @default.
- W1994992047 hasRelatedWork W2314947084 @default.
- W1994992047 hasRelatedWork W2317686969 @default.
- W1994992047 hasRelatedWork W2381344808 @default.
- W1994992047 hasRelatedWork W2014525704 @default.
- W1994992047 hasRelatedWork W2881653263 @default.
- W1994992047 isParatext "false" @default.
- W1994992047 isRetracted "false" @default.
- W1994992047 magId "1994992047" @default.
- W1994992047 workType "article" @default.