Matches in SemOpenAlex for { <https://semopenalex.org/work/W1995011071> ?p ?o ?g. }
- W1995011071 endingPage "657" @default.
- W1995011071 startingPage "649" @default.
- W1995011071 abstract "The mechanisms resulting in amorphous silicon deposition from silane glow discharges are classified in primary processes, (electron impact on silane), and secondary processes such as ion-molecule and radical-molecule reactions. The low pressure limit of a multipole DC discharge is shown to allow the measurement of various cross-sections associated with the primary processes, in particular spontaneous emission. The results from a plasma probing with ion mass spectrometry, laser induced fluorescence and other techniques are described in relevance to the problem of the thin film growth." @default.
- W1995011071 created "2016-06-24" @default.
- W1995011071 creator A5070386333 @default.
- W1995011071 date "1983-12-01" @default.
- W1995011071 modified "2023-10-14" @default.
- W1995011071 title "Fundamental mechanisms in silane plasma decompositions and amorphous silicon deposition" @default.
- W1995011071 cites W1968428741 @default.
- W1995011071 cites W1969987532 @default.
- W1995011071 cites W1972399055 @default.
- W1995011071 cites W1977419462 @default.
- W1995011071 cites W1978790619 @default.
- W1995011071 cites W1982642087 @default.
- W1995011071 cites W1985873836 @default.
- W1995011071 cites W1987210368 @default.
- W1995011071 cites W1988438523 @default.
- W1995011071 cites W1988874459 @default.
- W1995011071 cites W1989395918 @default.
- W1995011071 cites W1990304214 @default.
- W1995011071 cites W1990506098 @default.
- W1995011071 cites W1992469364 @default.
- W1995011071 cites W1993393696 @default.
- W1995011071 cites W1993845815 @default.
- W1995011071 cites W1994335381 @default.
- W1995011071 cites W1996541389 @default.
- W1995011071 cites W1996959204 @default.
- W1995011071 cites W1997226393 @default.
- W1995011071 cites W1998777910 @default.
- W1995011071 cites W2009611452 @default.
- W1995011071 cites W2010377407 @default.
- W1995011071 cites W2012747312 @default.
- W1995011071 cites W2021103293 @default.
- W1995011071 cites W2024745036 @default.
- W1995011071 cites W2025464236 @default.
- W1995011071 cites W2030583379 @default.
- W1995011071 cites W2032266651 @default.
- W1995011071 cites W2032625025 @default.
- W1995011071 cites W2039049345 @default.
- W1995011071 cites W2040053271 @default.
- W1995011071 cites W2042905200 @default.
- W1995011071 cites W2044477349 @default.
- W1995011071 cites W2053994856 @default.
- W1995011071 cites W2054881253 @default.
- W1995011071 cites W2055770614 @default.
- W1995011071 cites W2056681709 @default.
- W1995011071 cites W2062607052 @default.
- W1995011071 cites W2063128597 @default.
- W1995011071 cites W2069907632 @default.
- W1995011071 cites W2075267968 @default.
- W1995011071 cites W2081357577 @default.
- W1995011071 cites W2084572238 @default.
- W1995011071 cites W2087699142 @default.
- W1995011071 cites W2087966253 @default.
- W1995011071 cites W2090397999 @default.
- W1995011071 cites W2093212842 @default.
- W1995011071 cites W2157652862 @default.
- W1995011071 doi "https://doi.org/10.1016/0022-3093(83)90257-0" @default.
- W1995011071 hasPublicationYear "1983" @default.
- W1995011071 type Work @default.
- W1995011071 sameAs 1995011071 @default.
- W1995011071 citedByCount "68" @default.
- W1995011071 countsByYear W19950110712012 @default.
- W1995011071 countsByYear W19950110712014 @default.
- W1995011071 countsByYear W19950110712016 @default.
- W1995011071 countsByYear W19950110712018 @default.
- W1995011071 countsByYear W19950110712019 @default.
- W1995011071 countsByYear W19950110712020 @default.
- W1995011071 countsByYear W19950110712022 @default.
- W1995011071 crossrefType "journal-article" @default.
- W1995011071 hasAuthorship W1995011071A5070386333 @default.
- W1995011071 hasConcept C113196181 @default.
- W1995011071 hasConcept C121332964 @default.
- W1995011071 hasConcept C145148216 @default.
- W1995011071 hasConcept C151730666 @default.
- W1995011071 hasConcept C159467904 @default.
- W1995011071 hasConcept C178790620 @default.
- W1995011071 hasConcept C185592680 @default.
- W1995011071 hasConcept C192562407 @default.
- W1995011071 hasConcept C2776390347 @default.
- W1995011071 hasConcept C2776595061 @default.
- W1995011071 hasConcept C2778024649 @default.
- W1995011071 hasConcept C2778183973 @default.
- W1995011071 hasConcept C2779667780 @default.
- W1995011071 hasConcept C2816523 @default.
- W1995011071 hasConcept C49040817 @default.
- W1995011071 hasConcept C544956773 @default.
- W1995011071 hasConcept C56052488 @default.
- W1995011071 hasConcept C62520636 @default.
- W1995011071 hasConcept C64297162 @default.
- W1995011071 hasConcept C82706917 @default.
- W1995011071 hasConcept C86803240 @default.
- W1995011071 hasConceptScore W1995011071C113196181 @default.
- W1995011071 hasConceptScore W1995011071C121332964 @default.
- W1995011071 hasConceptScore W1995011071C145148216 @default.
- W1995011071 hasConceptScore W1995011071C151730666 @default.
- W1995011071 hasConceptScore W1995011071C159467904 @default.
- W1995011071 hasConceptScore W1995011071C178790620 @default.
- W1995011071 hasConceptScore W1995011071C185592680 @default.
- W1995011071 hasConceptScore W1995011071C192562407 @default.