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• W1995087975 endingPage "108" @default.
• W1995087975 startingPage "105" @default.
• W1995087975 abstract "Arsenic doping by ion implantation and thermal annealing of the BaSi2 epitaxial films grown on Si(111) substrates has been studied. Raman spectroscopy shows that a structural change can occur by annealing at 500 °C after As implantation with as high dose as 1.0 × 1015 cm− 2. This structural change is shown to result in the formation of an altered layer after annealing at the surface by cross-sectional scanning electron microscopy. Secondary ion mass spectroscopy reveals that the altered layer contains a significant amount of O atoms. With the altered layer present, average electron density up to 6.0 × 1019 cm− 3 has been realized, which is revealed by the Hall measurement. On the other hand, without the altered layer, high resistance of the BaSi2 layer prevented the electrical characterization. Current path is discussed by theoretically calculating the band alignment and resistance, and possible highest electron density without the altered layer is extracted to be less than 2 × 1017 cm− 3." @default.
• W1995087975 created "2016-06-24" @default.
• W1995087975 creator A5000655688 @default.
• W1995087975 creator A5009492017 @default.
• W1995087975 creator A5020769673 @default.
• W1995087975 creator A5029779344 @default.
• W1995087975 creator A5034768180 @default.
• W1995087975 date "2014-09-01" @default.
• W1995087975 modified "2023-09-26" @default.
• W1995087975 title "N-type doping of BaSi2 epitaxial films by arsenic ion implantation through a dose-dependent carrier generation mechanism" @default.
• W1995087975 cites W1486408020 @default.
• W1995087975 cites W1724451582 @default.
• W1995087975 cites W1964874849 @default.
• W1995087975 cites W2002877186 @default.
• W1995087975 cites W2004405816 @default.
• W1995087975 cites W2015428159 @default.
• W1995087975 cites W2016452826 @default.
• W1995087975 cites W2022928605 @default.
• W1995087975 cites W2026111662 @default.
• W1995087975 cites W2026451268 @default.
• W1995087975 cites W2053561271 @default.
• W1995087975 cites W353567199 @default.
• W1995087975 doi "https://doi.org/10.1016/j.tsf.2014.07.049" @default.
• W1995087975 hasPublicationYear "2014" @default.
• W1995087975 type Work @default.
• W1995087975 sameAs 1995087975 @default.
• W1995087975 citedByCount "22" @default.
• W1995087975 countsByYear W19950879752015 @default.
• W1995087975 countsByYear W19950879752016 @default.
• W1995087975 countsByYear W19950879752017 @default.
• W1995087975 countsByYear W19950879752018 @default.
• W1995087975 countsByYear W19950879752020 @default.
• W1995087975 countsByYear W19950879752021 @default.
• W1995087975 countsByYear W19950879752022 @default.
• W1995087975 countsByYear W19950879752023 @default.
• W1995087975 crossrefType "journal-article" @default.
• W1995087975 hasAuthorship W1995087975A5000655688 @default.
• W1995087975 hasAuthorship W1995087975A5009492017 @default.
• W1995087975 hasAuthorship W1995087975A5020769673 @default.
• W1995087975 hasAuthorship W1995087975A5029779344 @default.
• W1995087975 hasAuthorship W1995087975A5034768180 @default.
• W1995087975 hasBestOaLocation W19950879751 @default.
• W1995087975 hasConcept C110738630 @default.
• W1995087975 hasConcept C113196181 @default.
• W1995087975 hasConcept C120665830 @default.
• W1995087975 hasConcept C121332964 @default.
• W1995087975 hasConcept C145148216 @default.
• W1995087975 hasConcept C159985019 @default.
• W1995087975 hasConcept C171250308 @default.
• W1995087975 hasConcept C178790620 @default.
• W1995087975 hasConcept C185592680 @default.
• W1995087975 hasConcept C191897082 @default.
• W1995087975 hasConcept C192562407 @default.
• W1995087975 hasConcept C207521374 @default.
• W1995087975 hasConcept C26771246 @default.
• W1995087975 hasConcept C2777855556 @default.
• W1995087975 hasConcept C2779227376 @default.
• W1995087975 hasConcept C40003534 @default.
• W1995087975 hasConcept C41823505 @default.
• W1995087975 hasConcept C43617362 @default.
• W1995087975 hasConcept C49040817 @default.
• W1995087975 hasConcept C502230775 @default.
• W1995087975 hasConcept C57863236 @default.
• W1995087975 hasConcept C66825105 @default.
• W1995087975 hasConcept C77671233 @default.
• W1995087975 hasConceptScore W1995087975C110738630 @default.
• W1995087975 hasConceptScore W1995087975C113196181 @default.
• W1995087975 hasConceptScore W1995087975C120665830 @default.
• W1995087975 hasConceptScore W1995087975C121332964 @default.
• W1995087975 hasConceptScore W1995087975C145148216 @default.
• W1995087975 hasConceptScore W1995087975C159985019 @default.
• W1995087975 hasConceptScore W1995087975C171250308 @default.
• W1995087975 hasConceptScore W1995087975C178790620 @default.
• W1995087975 hasConceptScore W1995087975C185592680 @default.
• W1995087975 hasConceptScore W1995087975C191897082 @default.
• W1995087975 hasConceptScore W1995087975C192562407 @default.
• W1995087975 hasConceptScore W1995087975C207521374 @default.
• W1995087975 hasConceptScore W1995087975C26771246 @default.
• W1995087975 hasConceptScore W1995087975C2777855556 @default.
• W1995087975 hasConceptScore W1995087975C2779227376 @default.
• W1995087975 hasConceptScore W1995087975C40003534 @default.
• W1995087975 hasConceptScore W1995087975C41823505 @default.
• W1995087975 hasConceptScore W1995087975C43617362 @default.
• W1995087975 hasConceptScore W1995087975C49040817 @default.
• W1995087975 hasConceptScore W1995087975C502230775 @default.
• W1995087975 hasConceptScore W1995087975C57863236 @default.
• W1995087975 hasConceptScore W1995087975C66825105 @default.
• W1995087975 hasConceptScore W1995087975C77671233 @default.
• W1995087975 hasFunder F4320320912 @default.
• W1995087975 hasFunder F4320334789 @default.
• W1995087975 hasFunder F4320338075 @default.
• W1995087975 hasLocation W19950879751 @default.
• W1995087975 hasOpenAccess W1995087975 @default.
• W1995087975 hasPrimaryLocation W19950879751 @default.
• W1995087975 hasRelatedWork W1964261261 @default.
• W1995087975 hasRelatedWork W1985325156 @default.
• W1995087975 hasRelatedWork W1997640774 @default.
• W1995087975 hasRelatedWork W2013057071 @default.

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