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- W1995109898 abstract "We have designed and developed a new double-etch technique for fabricating three-dimensional millimeter-wave photonic band-gap crystals. This technique doubles the band-gap frequency obtainable from silicon wafers. By introducing overetching, the double-etch geometry allows one-way tuning of the midgap frequency. We have experimentally demonstrated this property by fabricating and testing structures with different overetch ratios. Terahertz spectroscopy techniques were used to measure photonic band-gap crystals with midgap frequencies ranging from 340 to 375 GHz." @default.
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- W1995109898 date "1994-09-26" @default.
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- W1995109898 title "Double-etch geometry for millimeter-wave photonic band-gap crystals" @default.
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- W1995109898 doi "https://doi.org/10.1063/1.112929" @default.
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