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- W1995118566 abstract "Multilayer X-ray mirrors of W and B4C with period from 50 Å down to 5 Å, of interest as linear polarizers for soft X-rays, have been studied by X-ray diffraction and high-resolution transmission electron microscopy (HRTEM). Over this region soft X-ray reflectivity falls from 80% to 4% of the theoretical value. Hard X-ray reflectivity also falls dramatically, but the multilayers still show reflectivity for periods as small as d=4.7 Å. The interface width (representing both roughness and interdiffusion) decreases from 7.5 Å to 2.5 Å, but exceeds the thickness of the individual layers for the smallest periods. HRTEM shows disruption of layer continuity at d=10 Å and a loss of visible composition modulation at d=8 Å, while the reflectivity begins to fall sharply near d=15 Å. This is consistent with incomplete or discontinuous W layers below about d=15 Å, and compares reasonably with other experimental and theoretical data on growth of very thin metal films." @default.
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- W1995118566 date "1998-07-01" @default.
- W1995118566 modified "2023-09-27" @default.
- W1995118566 title "X-ray optical multilayers: microstructure limits on reflectivity at ultra-short periods" @default.
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- W1995118566 doi "https://doi.org/10.1016/s1359-6454(98)00083-4" @default.
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