FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1995151330> ?p ?o ?g. }

• W1995151330 endingPage "6097" @default.
• W1995151330 startingPage "6092" @default.
• W1995151330 abstract "Carrier density and mobility measurements were performed on heavily arsenic-doped silicon-on-insulator specimens after 2 MeV implantation of Si+ ions. It is found that implantation induces a marked reduction of the electron density, which increases with the concentration of active dopant, and approaches saturation for a Si+ fluence of 5×1015 cm−2. Recovery of the carriers was studied by isothermal annealing at temperatures in the range of 550–800 °C. It is shown that this phenomenon can be separated by As deactivation, which takes place at the same time, and that the kinetics of carrier recovery can be expressed by the rate equation: −dn/dt=nγC exp(−Ea/kT), with Ea=2.3 eV and γ=2.32. The recovery rate increases with As concentration, and values of C that account for this phenomenon are reported. These results and the annealing behavior of the carrier mobility in the damaged and undamaged reference samples indicate that the decrease of the carrier density upon irradiation can be attributed to acceptor centers, probably due to point defects clusters." @default.
• W1995151330 created "2016-06-24" @default.
• W1995151330 creator A5000433459 @default.
• W1995151330 creator A5031560456 @default.
• W1995151330 creator A5042104132 @default.
• W1995151330 creator A5063885555 @default.
• W1995151330 date "2004-05-25" @default.
• W1995151330 modified "2023-10-16" @default.
• W1995151330 title "Recovery of the carrier density in arsenic-doped silicon after high energy (2 MeV) Si+ implantation" @default.
• W1995151330 cites W1965929226 @default.
• W1995151330 cites W1969047247 @default.
• W1995151330 cites W1976578384 @default.
• W1995151330 cites W1988358160 @default.
• W1995151330 cites W1991556167 @default.
• W1995151330 cites W1991916163 @default.
• W1995151330 cites W2004560499 @default.
• W1995151330 cites W2006931055 @default.
• W1995151330 cites W2008130327 @default.
• W1995151330 cites W2009920816 @default.
• W1995151330 cites W2012026994 @default.
• W1995151330 cites W2012790797 @default.
• W1995151330 cites W2013870132 @default.
• W1995151330 cites W2086158541 @default.
• W1995151330 cites W2160100656 @default.
• W1995151330 doi "https://doi.org/10.1063/1.1713044" @default.
• W1995151330 hasPublicationYear "2004" @default.
• W1995151330 type Work @default.
• W1995151330 sameAs 1995151330 @default.
• W1995151330 citedByCount "5" @default.
• W1995151330 countsByYear W19951513302022 @default.
• W1995151330 crossrefType "journal-article" @default.
• W1995151330 hasAuthorship W1995151330A5000433459 @default.
• W1995151330 hasAuthorship W1995151330A5031560456 @default.
• W1995151330 hasAuthorship W1995151330A5042104132 @default.
• W1995151330 hasAuthorship W1995151330A5063885555 @default.
• W1995151330 hasConcept C106782819 @default.
• W1995151330 hasConcept C109724073 @default.
• W1995151330 hasConcept C113196181 @default.
• W1995151330 hasConcept C114614502 @default.
• W1995151330 hasConcept C121332964 @default.
• W1995151330 hasConcept C133347239 @default.
• W1995151330 hasConcept C145148216 @default.
• W1995151330 hasConcept C147789679 @default.
• W1995151330 hasConcept C164675345 @default.
• W1995151330 hasConcept C178790620 @default.
• W1995151330 hasConcept C185592680 @default.
• W1995151330 hasConcept C191897082 @default.
• W1995151330 hasConcept C191952053 @default.
• W1995151330 hasConcept C192562407 @default.
• W1995151330 hasConcept C198865614 @default.
• W1995151330 hasConcept C22078206 @default.
• W1995151330 hasConcept C26873012 @default.
• W1995151330 hasConcept C2777855556 @default.
• W1995151330 hasConcept C2779892579 @default.
• W1995151330 hasConcept C33923547 @default.
• W1995151330 hasConcept C41823505 @default.
• W1995151330 hasConcept C43617362 @default.
• W1995151330 hasConcept C49040817 @default.
• W1995151330 hasConcept C502230775 @default.
• W1995151330 hasConcept C544956773 @default.
• W1995151330 hasConcept C57863236 @default.
• W1995151330 hasConcept C71987851 @default.
• W1995151330 hasConcept C8010536 @default.
• W1995151330 hasConcept C95121573 @default.
• W1995151330 hasConcept C97355855 @default.
• W1995151330 hasConcept C9930424 @default.
• W1995151330 hasConceptScore W1995151330C106782819 @default.
• W1995151330 hasConceptScore W1995151330C109724073 @default.
• W1995151330 hasConceptScore W1995151330C113196181 @default.
• W1995151330 hasConceptScore W1995151330C114614502 @default.
• W1995151330 hasConceptScore W1995151330C121332964 @default.
• W1995151330 hasConceptScore W1995151330C133347239 @default.
• W1995151330 hasConceptScore W1995151330C145148216 @default.
• W1995151330 hasConceptScore W1995151330C147789679 @default.
• W1995151330 hasConceptScore W1995151330C164675345 @default.
• W1995151330 hasConceptScore W1995151330C178790620 @default.
• W1995151330 hasConceptScore W1995151330C185592680 @default.
• W1995151330 hasConceptScore W1995151330C191897082 @default.
• W1995151330 hasConceptScore W1995151330C191952053 @default.
• W1995151330 hasConceptScore W1995151330C192562407 @default.
• W1995151330 hasConceptScore W1995151330C198865614 @default.
• W1995151330 hasConceptScore W1995151330C22078206 @default.
• W1995151330 hasConceptScore W1995151330C26873012 @default.
• W1995151330 hasConceptScore W1995151330C2777855556 @default.
• W1995151330 hasConceptScore W1995151330C2779892579 @default.
• W1995151330 hasConceptScore W1995151330C33923547 @default.
• W1995151330 hasConceptScore W1995151330C41823505 @default.
• W1995151330 hasConceptScore W1995151330C43617362 @default.
• W1995151330 hasConceptScore W1995151330C49040817 @default.
• W1995151330 hasConceptScore W1995151330C502230775 @default.
• W1995151330 hasConceptScore W1995151330C544956773 @default.
• W1995151330 hasConceptScore W1995151330C57863236 @default.
• W1995151330 hasConceptScore W1995151330C71987851 @default.
• W1995151330 hasConceptScore W1995151330C8010536 @default.
• W1995151330 hasConceptScore W1995151330C95121573 @default.
• W1995151330 hasConceptScore W1995151330C97355855 @default.
• W1995151330 hasConceptScore W1995151330C9930424 @default.
• W1995151330 hasIssue "11" @default.

• next