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- W1995222459 abstract "This paper presents the design, fabrication and spectral measurements of an Ultra-Violet (UV) Linear Variable Optical Filter (LVOF)-based micro-spectrometer operating in the 300 nm - 400 nm wavelength range. The UV LVOF has been fabricated in an IC-Compatible process using resist reflow. Characterization of the LVOF, by passing monochromatic light through the LVOF, shows high linearity of the profile. The filter provides the possibility to have a robust high-resolution microspectrometer in the UV on a CMOS chip. Spectrum of a Mercury lamp has been measured using the UV LVOF-microspectrometer with 0.5 nm spectral resolution." @default.
- W1995222459 created "2016-06-24" @default.
- W1995222459 creator A5037827418 @default.
- W1995222459 date "2011-10-01" @default.
- W1995222459 modified "2023-09-26" @default.
- W1995222459 title "Spectral measurement with a UV linear-variable optical filter microspectrometer" @default.
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- W1995222459 doi "https://doi.org/10.1109/icsens.2011.6127349" @default.
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