FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W1995223003> ?p ?o ?g. }

• W1995223003 abstract "The continuing trend of shrinking dimension and the related specifications requires tightening of control loops. To support the tighter control loops, the metrology sampling plans will require increasing sampling density and frequency. This study shows that tighter control of scanner focus and AEI CD and profile parameters requires sampling schemes with intra-field measurement points, and a frequent update of the corrections. This drives the need for high-speed smalltarget metrology. Experiments show that this can be achieved by the YieldStar angle resolved scatterometer, demonstrating measurements on areas of 16×16μm² for focus metrology and 12×12μm² for CD metrology, at a MAM time below 0.5s." @default.
• W1995223003 created "2016-06-24" @default.
• W1995223003 creator A5002328003 @default.
• W1995223003 creator A5008827681 @default.
• W1995223003 creator A5012456906 @default.
• W1995223003 creator A5016152303 @default.
• W1995223003 creator A5018987720 @default.
• W1995223003 creator A5021035442 @default.
• W1995223003 creator A5032979919 @default.
• W1995223003 creator A5047276809 @default.
• W1995223003 creator A5055840947 @default.
• W1995223003 creator A5061611990 @default.
• W1995223003 creator A5070291725 @default.
• W1995223003 creator A5076474623 @default.
• W1995223003 creator A5081223675 @default.
• W1995223003 creator A5086899703 @default.
• W1995223003 creator A5040203709 @default.
• W1995223003 date "2015-03-19" @default.
• W1995223003 modified "2023-09-23" @default.
• W1995223003 title "Intra-field patterning control using high-speed and small-target optical metrology of CD and focus" @default.
• W1995223003 cites W2001171317 @default.
• W1995223003 cites W2006863651 @default.
• W1995223003 cites W2026409271 @default.
• W1995223003 cites W2041600236 @default.
• W1995223003 cites W2046834915 @default.
• W1995223003 cites W2050787128 @default.
• W1995223003 cites W2061999328 @default.
• W1995223003 cites W2126857323 @default.
• W1995223003 doi "https://doi.org/10.1117/12.2085957" @default.
• W1995223003 hasPublicationYear "2015" @default.
• W1995223003 type Work @default.
• W1995223003 sameAs 1995223003 @default.
• W1995223003 citedByCount "1" @default.
• W1995223003 countsByYear W19952230032016 @default.
• W1995223003 crossrefType "proceedings-article" @default.
• W1995223003 hasAuthorship W1995223003A5002328003 @default.
• W1995223003 hasAuthorship W1995223003A5008827681 @default.
• W1995223003 hasAuthorship W1995223003A5012456906 @default.
• W1995223003 hasAuthorship W1995223003A5016152303 @default.
• W1995223003 hasAuthorship W1995223003A5018987720 @default.
• W1995223003 hasAuthorship W1995223003A5021035442 @default.
• W1995223003 hasAuthorship W1995223003A5032979919 @default.
• W1995223003 hasAuthorship W1995223003A5040203709 @default.
• W1995223003 hasAuthorship W1995223003A5047276809 @default.
• W1995223003 hasAuthorship W1995223003A5055840947 @default.
• W1995223003 hasAuthorship W1995223003A5061611990 @default.
• W1995223003 hasAuthorship W1995223003A5070291725 @default.
• W1995223003 hasAuthorship W1995223003A5076474623 @default.
• W1995223003 hasAuthorship W1995223003A5081223675 @default.
• W1995223003 hasAuthorship W1995223003A5086899703 @default.
• W1995223003 hasConcept C120665830 @default.
• W1995223003 hasConcept C121332964 @default.
• W1995223003 hasConcept C137209882 @default.
• W1995223003 hasConcept C140779682 @default.
• W1995223003 hasConcept C150627866 @default.
• W1995223003 hasConcept C165880335 @default.
• W1995223003 hasConcept C192209626 @default.
• W1995223003 hasConcept C195766429 @default.
• W1995223003 hasConcept C202444582 @default.
• W1995223003 hasConcept C207789793 @default.
• W1995223003 hasConcept C2776212561 @default.
• W1995223003 hasConcept C2779751349 @default.
• W1995223003 hasConcept C33923547 @default.
• W1995223003 hasConcept C41008148 @default.
• W1995223003 hasConcept C554190296 @default.
• W1995223003 hasConcept C62520636 @default.
• W1995223003 hasConcept C76155785 @default.
• W1995223003 hasConcept C94915269 @default.
• W1995223003 hasConcept C9652623 @default.
• W1995223003 hasConceptScore W1995223003C120665830 @default.
• W1995223003 hasConceptScore W1995223003C121332964 @default.
• W1995223003 hasConceptScore W1995223003C137209882 @default.
• W1995223003 hasConceptScore W1995223003C140779682 @default.
• W1995223003 hasConceptScore W1995223003C150627866 @default.
• W1995223003 hasConceptScore W1995223003C165880335 @default.
• W1995223003 hasConceptScore W1995223003C192209626 @default.
• W1995223003 hasConceptScore W1995223003C195766429 @default.
• W1995223003 hasConceptScore W1995223003C202444582 @default.
• W1995223003 hasConceptScore W1995223003C207789793 @default.
• W1995223003 hasConceptScore W1995223003C2776212561 @default.
• W1995223003 hasConceptScore W1995223003C2779751349 @default.
• W1995223003 hasConceptScore W1995223003C33923547 @default.
• W1995223003 hasConceptScore W1995223003C41008148 @default.
• W1995223003 hasConceptScore W1995223003C554190296 @default.
• W1995223003 hasConceptScore W1995223003C62520636 @default.
• W1995223003 hasConceptScore W1995223003C76155785 @default.
• W1995223003 hasConceptScore W1995223003C94915269 @default.
• W1995223003 hasConceptScore W1995223003C9652623 @default.
• W1995223003 hasLocation W19952230031 @default.
• W1995223003 hasOpenAccess W1995223003 @default.
• W1995223003 hasPrimaryLocation W19952230031 @default.
• W1995223003 hasRelatedWork W13365175 @default.
• W1995223003 hasRelatedWork W1999984697 @default.
• W1995223003 hasRelatedWork W2005373453 @default.
• W1995223003 hasRelatedWork W2027253389 @default.
• W1995223003 hasRelatedWork W2050825732 @default.
• W1995223003 hasRelatedWork W2052385620 @default.
• W1995223003 hasRelatedWork W2064999352 @default.
• W1995223003 hasRelatedWork W2069737729 @default.
• W1995223003 hasRelatedWork W2087246404 @default.

• next