Matches in SemOpenAlex for { <https://semopenalex.org/work/W1995243315> ?p ?o ?g. }
- W1995243315 endingPage "143" @default.
- W1995243315 startingPage "137" @default.
- W1995243315 abstract "Electron projection lithography (EPL) is one of the most promising candidates for next generation lithography (NGL). In this paper, we report on the realization of the electron column modules for the SCALPEL high-throughput/alpha electron projection lithography tools, designed to demonstrate high wafer throughput at resolutions at and below 100 nm. For the illumination and projection systems we have opted for a highly modular set-up of each electron optical component to achieve maximum flexibility and facilitate a fast and smooth evolution towards higher throughput and resolution. A crucial point for the overall tool performance is the timely availability of system alignment and metrology strategies. Here we adapt state-of-the-art techniques from light optical lens manufacturing to a maximum amount. During the whole tool development strict design and process rules are applied which will allow an easy transition of all engineering and manufacturing processes for high-volume column production." @default.
- W1995243315 created "2016-06-24" @default.
- W1995243315 creator A5020400856 @default.
- W1995243315 creator A5022448433 @default.
- W1995243315 creator A5025218596 @default.
- W1995243315 creator A5029432142 @default.
- W1995243315 creator A5036616624 @default.
- W1995243315 creator A5039174071 @default.
- W1995243315 creator A5059980649 @default.
- W1995243315 creator A5061393300 @default.
- W1995243315 creator A5066007177 @default.
- W1995243315 creator A5069824114 @default.
- W1995243315 creator A5072262445 @default.
- W1995243315 creator A5081566263 @default.
- W1995243315 creator A5089263323 @default.
- W1995243315 date "2001-09-01" @default.
- W1995243315 modified "2023-09-27" @default.
- W1995243315 title "Progress on the realization of the electron column modules for SCALPEL high-throughput/alpha electron projection lithography tools" @default.
- W1995243315 cites W1993887220 @default.
- W1995243315 cites W2083669136 @default.
- W1995243315 doi "https://doi.org/10.1016/s0167-9317(01)00505-6" @default.
- W1995243315 hasPublicationYear "2001" @default.
- W1995243315 type Work @default.
- W1995243315 sameAs 1995243315 @default.
- W1995243315 citedByCount "1" @default.
- W1995243315 countsByYear W19952433152014 @default.
- W1995243315 crossrefType "journal-article" @default.
- W1995243315 hasAuthorship W1995243315A5020400856 @default.
- W1995243315 hasAuthorship W1995243315A5022448433 @default.
- W1995243315 hasAuthorship W1995243315A5025218596 @default.
- W1995243315 hasAuthorship W1995243315A5029432142 @default.
- W1995243315 hasAuthorship W1995243315A5036616624 @default.
- W1995243315 hasAuthorship W1995243315A5039174071 @default.
- W1995243315 hasAuthorship W1995243315A5059980649 @default.
- W1995243315 hasAuthorship W1995243315A5061393300 @default.
- W1995243315 hasAuthorship W1995243315A5066007177 @default.
- W1995243315 hasAuthorship W1995243315A5069824114 @default.
- W1995243315 hasAuthorship W1995243315A5072262445 @default.
- W1995243315 hasAuthorship W1995243315A5081566263 @default.
- W1995243315 hasAuthorship W1995243315A5089263323 @default.
- W1995243315 hasConcept C105795698 @default.
- W1995243315 hasConcept C11413529 @default.
- W1995243315 hasConcept C120665830 @default.
- W1995243315 hasConcept C121332964 @default.
- W1995243315 hasConcept C126042441 @default.
- W1995243315 hasConcept C147120987 @default.
- W1995243315 hasConcept C157764524 @default.
- W1995243315 hasConcept C171250308 @default.
- W1995243315 hasConcept C171606756 @default.
- W1995243315 hasConcept C185544564 @default.
- W1995243315 hasConcept C192562407 @default.
- W1995243315 hasConcept C200274948 @default.
- W1995243315 hasConcept C204223013 @default.
- W1995243315 hasConcept C2779227376 @default.
- W1995243315 hasConcept C2780551164 @default.
- W1995243315 hasConcept C2781089630 @default.
- W1995243315 hasConcept C33923547 @default.
- W1995243315 hasConcept C41008148 @default.
- W1995243315 hasConcept C41794268 @default.
- W1995243315 hasConcept C49040817 @default.
- W1995243315 hasConcept C49453240 @default.
- W1995243315 hasConcept C53524968 @default.
- W1995243315 hasConcept C555944384 @default.
- W1995243315 hasConcept C57493831 @default.
- W1995243315 hasConcept C64943373 @default.
- W1995243315 hasConcept C76155785 @default.
- W1995243315 hasConceptScore W1995243315C105795698 @default.
- W1995243315 hasConceptScore W1995243315C11413529 @default.
- W1995243315 hasConceptScore W1995243315C120665830 @default.
- W1995243315 hasConceptScore W1995243315C121332964 @default.
- W1995243315 hasConceptScore W1995243315C126042441 @default.
- W1995243315 hasConceptScore W1995243315C147120987 @default.
- W1995243315 hasConceptScore W1995243315C157764524 @default.
- W1995243315 hasConceptScore W1995243315C171250308 @default.
- W1995243315 hasConceptScore W1995243315C171606756 @default.
- W1995243315 hasConceptScore W1995243315C185544564 @default.
- W1995243315 hasConceptScore W1995243315C192562407 @default.
- W1995243315 hasConceptScore W1995243315C200274948 @default.
- W1995243315 hasConceptScore W1995243315C204223013 @default.
- W1995243315 hasConceptScore W1995243315C2779227376 @default.
- W1995243315 hasConceptScore W1995243315C2780551164 @default.
- W1995243315 hasConceptScore W1995243315C2781089630 @default.
- W1995243315 hasConceptScore W1995243315C33923547 @default.
- W1995243315 hasConceptScore W1995243315C41008148 @default.
- W1995243315 hasConceptScore W1995243315C41794268 @default.
- W1995243315 hasConceptScore W1995243315C49040817 @default.
- W1995243315 hasConceptScore W1995243315C49453240 @default.
- W1995243315 hasConceptScore W1995243315C53524968 @default.
- W1995243315 hasConceptScore W1995243315C555944384 @default.
- W1995243315 hasConceptScore W1995243315C57493831 @default.
- W1995243315 hasConceptScore W1995243315C64943373 @default.
- W1995243315 hasConceptScore W1995243315C76155785 @default.
- W1995243315 hasLocation W19952433151 @default.
- W1995243315 hasOpenAccess W1995243315 @default.
- W1995243315 hasPrimaryLocation W19952433151 @default.
- W1995243315 hasRelatedWork W1978143552 @default.
- W1995243315 hasRelatedWork W2041379651 @default.
- W1995243315 hasRelatedWork W2045370251 @default.