Matches in SemOpenAlex for { <https://semopenalex.org/work/W1995258167> ?p ?o ?g. }
Showing items 1 to 87 of
87
with 100 items per page.
- W1995258167 endingPage "4334" @default.
- W1995258167 startingPage "4332" @default.
- W1995258167 abstract "A microfabricated, electrical connector is proposed for facilitating the mounting of atomic force microscopy (AFM) probes, which have an integrated sensor and/or actuator. Only a base chip, which acts as a socket, is permanently fixed onto a printed circuit board and electronically connected by standard wire bonding. The AFM chip, the plug, is flipped onto the base chip and pressed from the backside by a spring. Electrical contact with the eventual stress sensors, capacitive or piezoelectric sensor/actuators, is provided by contact bumps. These bumps of about 8 µm height are placed onto the base chip. They touch the pads on the AFM chip that were originally foreseen to be for wire bonding and thus provide the electrical contact. This connector schema was successfully used to register AFM images with piezoresistive cantilevers." @default.
- W1995258167 created "2016-06-24" @default.
- W1995258167 creator A5002122862 @default.
- W1995258167 creator A5025172993 @default.
- W1995258167 creator A5047229074 @default.
- W1995258167 date "2002-06-30" @default.
- W1995258167 modified "2023-09-23" @default.
- W1995258167 title "Microfabricated Electrical Connector for Atomic Force Microscopy Probes with Integrated Sensor/Actuator" @default.
- W1995258167 cites W2006515893 @default.
- W1995258167 cites W2118214210 @default.
- W1995258167 doi "https://doi.org/10.1143/jjap.41.4332" @default.
- W1995258167 hasPublicationYear "2002" @default.
- W1995258167 type Work @default.
- W1995258167 sameAs 1995258167 @default.
- W1995258167 citedByCount "2" @default.
- W1995258167 countsByYear W19952581672020 @default.
- W1995258167 crossrefType "journal-article" @default.
- W1995258167 hasAuthorship W1995258167A5002122862 @default.
- W1995258167 hasAuthorship W1995258167A5025172993 @default.
- W1995258167 hasAuthorship W1995258167A5047229074 @default.
- W1995258167 hasConcept C100082104 @default.
- W1995258167 hasConcept C110925319 @default.
- W1995258167 hasConcept C119599485 @default.
- W1995258167 hasConcept C120793396 @default.
- W1995258167 hasConcept C121332964 @default.
- W1995258167 hasConcept C123745756 @default.
- W1995258167 hasConcept C127413603 @default.
- W1995258167 hasConcept C132235601 @default.
- W1995258167 hasConcept C140269135 @default.
- W1995258167 hasConcept C141354745 @default.
- W1995258167 hasConcept C159985019 @default.
- W1995258167 hasConcept C165005293 @default.
- W1995258167 hasConcept C171250308 @default.
- W1995258167 hasConcept C172707124 @default.
- W1995258167 hasConcept C192562407 @default.
- W1995258167 hasConcept C198490522 @default.
- W1995258167 hasConcept C206755178 @default.
- W1995258167 hasConcept C31258907 @default.
- W1995258167 hasConcept C37977207 @default.
- W1995258167 hasConcept C41008148 @default.
- W1995258167 hasConcept C49040817 @default.
- W1995258167 hasConcept C62520636 @default.
- W1995258167 hasConcept C81302111 @default.
- W1995258167 hasConceptScore W1995258167C100082104 @default.
- W1995258167 hasConceptScore W1995258167C110925319 @default.
- W1995258167 hasConceptScore W1995258167C119599485 @default.
- W1995258167 hasConceptScore W1995258167C120793396 @default.
- W1995258167 hasConceptScore W1995258167C121332964 @default.
- W1995258167 hasConceptScore W1995258167C123745756 @default.
- W1995258167 hasConceptScore W1995258167C127413603 @default.
- W1995258167 hasConceptScore W1995258167C132235601 @default.
- W1995258167 hasConceptScore W1995258167C140269135 @default.
- W1995258167 hasConceptScore W1995258167C141354745 @default.
- W1995258167 hasConceptScore W1995258167C159985019 @default.
- W1995258167 hasConceptScore W1995258167C165005293 @default.
- W1995258167 hasConceptScore W1995258167C171250308 @default.
- W1995258167 hasConceptScore W1995258167C172707124 @default.
- W1995258167 hasConceptScore W1995258167C192562407 @default.
- W1995258167 hasConceptScore W1995258167C198490522 @default.
- W1995258167 hasConceptScore W1995258167C206755178 @default.
- W1995258167 hasConceptScore W1995258167C31258907 @default.
- W1995258167 hasConceptScore W1995258167C37977207 @default.
- W1995258167 hasConceptScore W1995258167C41008148 @default.
- W1995258167 hasConceptScore W1995258167C49040817 @default.
- W1995258167 hasConceptScore W1995258167C62520636 @default.
- W1995258167 hasConceptScore W1995258167C81302111 @default.
- W1995258167 hasIssue "Part 1, No. 6B" @default.
- W1995258167 hasLocation W19952581671 @default.
- W1995258167 hasOpenAccess W1995258167 @default.
- W1995258167 hasPrimaryLocation W19952581671 @default.
- W1995258167 hasRelatedWork W1545035396 @default.
- W1995258167 hasRelatedWork W2008438232 @default.
- W1995258167 hasRelatedWork W2036681706 @default.
- W1995258167 hasRelatedWork W2042128583 @default.
- W1995258167 hasRelatedWork W2062394369 @default.
- W1995258167 hasRelatedWork W2141791435 @default.
- W1995258167 hasRelatedWork W2162079034 @default.
- W1995258167 hasRelatedWork W2479468204 @default.
- W1995258167 hasRelatedWork W3094329078 @default.
- W1995258167 hasRelatedWork W3140224522 @default.
- W1995258167 hasVolume "41" @default.
- W1995258167 isParatext "false" @default.
- W1995258167 isRetracted "false" @default.
- W1995258167 magId "1995258167" @default.
- W1995258167 workType "article" @default.