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- W1995316623 endingPage "2086" @default.
- W1995316623 startingPage "2084" @default.
- W1995316623 abstract "We have extended the capability and versatility of a chemical beam epitaxial (CBE) system by demonstrating reactive chemical beam etching (RCBE) of InP using phosphorus trichloride (PCl3) as the gaseous etching beam injected directly into the growth chamber. This permits instant switching from etching to growth (and vice versa) in the same run for the first time in CBE. We investigate RCBE of InP at various substrate temperatures between ∼400 and 580 °C, under different PCl3 fluences, and etching conditions. Excellent surface morphology was obtained at high temperatures (≳530–570 °C) and under an etching rate of ≲6 Å/s. We also found that upon addition of trimethylindium flow equivalent to a growth rate of 1 Å/s during RCBE a dramatic improvement in surface morphology was obtained even at a high net etching rate of 10 Å/s. The surface morphology obtained under such conditions is indistinguishable from that of the original substrate surface." @default.
- W1995316623 created "2016-06-24" @default.
- W1995316623 creator A5006580713 @default.
- W1995316623 creator A5051116498 @default.
- W1995316623 creator A5066599859 @default.
- W1995316623 date "1993-04-26" @default.
- W1995316623 modified "2023-09-26" @default.
- W1995316623 title "Reactive chemical beam etching of InP inside a chemical beam epitaxial growth chamber using phosphorus trichloride" @default.
- W1995316623 cites W1969986474 @default.
- W1995316623 cites W1997770880 @default.
- W1995316623 cites W2014804489 @default.
- W1995316623 cites W2021696663 @default.
- W1995316623 cites W2023691872 @default.
- W1995316623 cites W2027543173 @default.
- W1995316623 cites W2044065798 @default.
- W1995316623 cites W2064367144 @default.
- W1995316623 cites W2087484049 @default.
- W1995316623 doi "https://doi.org/10.1063/1.109486" @default.
- W1995316623 hasPublicationYear "1993" @default.
- W1995316623 type Work @default.
- W1995316623 sameAs 1995316623 @default.
- W1995316623 citedByCount "35" @default.
- W1995316623 crossrefType "journal-article" @default.
- W1995316623 hasAuthorship W1995316623A5006580713 @default.
- W1995316623 hasAuthorship W1995316623A5051116498 @default.
- W1995316623 hasAuthorship W1995316623A5066599859 @default.
- W1995316623 hasConcept C100460472 @default.
- W1995316623 hasConcept C110738630 @default.
- W1995316623 hasConcept C111368507 @default.
- W1995316623 hasConcept C113196181 @default.
- W1995316623 hasConcept C127313418 @default.
- W1995316623 hasConcept C1291036 @default.
- W1995316623 hasConcept C130472188 @default.
- W1995316623 hasConcept C171250308 @default.
- W1995316623 hasConcept C173696418 @default.
- W1995316623 hasConcept C175665537 @default.
- W1995316623 hasConcept C185592680 @default.
- W1995316623 hasConcept C192562407 @default.
- W1995316623 hasConcept C2775895354 @default.
- W1995316623 hasConcept C2777289219 @default.
- W1995316623 hasConcept C2779227376 @default.
- W1995316623 hasConcept C33220542 @default.
- W1995316623 hasConcept C3792809 @default.
- W1995316623 hasConcept C43617362 @default.
- W1995316623 hasConcept C49040817 @default.
- W1995316623 hasConceptScore W1995316623C100460472 @default.
- W1995316623 hasConceptScore W1995316623C110738630 @default.
- W1995316623 hasConceptScore W1995316623C111368507 @default.
- W1995316623 hasConceptScore W1995316623C113196181 @default.
- W1995316623 hasConceptScore W1995316623C127313418 @default.
- W1995316623 hasConceptScore W1995316623C1291036 @default.
- W1995316623 hasConceptScore W1995316623C130472188 @default.
- W1995316623 hasConceptScore W1995316623C171250308 @default.
- W1995316623 hasConceptScore W1995316623C173696418 @default.
- W1995316623 hasConceptScore W1995316623C175665537 @default.
- W1995316623 hasConceptScore W1995316623C185592680 @default.
- W1995316623 hasConceptScore W1995316623C192562407 @default.
- W1995316623 hasConceptScore W1995316623C2775895354 @default.
- W1995316623 hasConceptScore W1995316623C2777289219 @default.
- W1995316623 hasConceptScore W1995316623C2779227376 @default.
- W1995316623 hasConceptScore W1995316623C33220542 @default.
- W1995316623 hasConceptScore W1995316623C3792809 @default.
- W1995316623 hasConceptScore W1995316623C43617362 @default.
- W1995316623 hasConceptScore W1995316623C49040817 @default.
- W1995316623 hasIssue "17" @default.
- W1995316623 hasLocation W19953166231 @default.
- W1995316623 hasOpenAccess W1995316623 @default.
- W1995316623 hasPrimaryLocation W19953166231 @default.
- W1995316623 hasRelatedWork W1482397683 @default.
- W1995316623 hasRelatedWork W1579830748 @default.
- W1995316623 hasRelatedWork W1991288435 @default.
- W1995316623 hasRelatedWork W1995316623 @default.
- W1995316623 hasRelatedWork W2009420109 @default.
- W1995316623 hasRelatedWork W2031418563 @default.
- W1995316623 hasRelatedWork W2052794911 @default.
- W1995316623 hasRelatedWork W2082133582 @default.
- W1995316623 hasRelatedWork W2086452145 @default.
- W1995316623 hasRelatedWork W2378038125 @default.
- W1995316623 hasVolume "62" @default.
- W1995316623 isParatext "false" @default.
- W1995316623 isRetracted "false" @default.
- W1995316623 magId "1995316623" @default.
- W1995316623 workType "article" @default.