Matches in SemOpenAlex for { <https://semopenalex.org/work/W1995422915> ?p ?o ?g. }
Showing items 1 to 67 of
67
with 100 items per page.
- W1995422915 abstract "This paper describes a back-side illuminated 1 Megapixel CMOS image sensormade in 0.18um CMOS process for EUV detection. The sensor applied a so-calldual-transfer scheme to achieve low noise, high dynamic range. The EUVsensitivity is achieved with backside illumination use SOI-based solution. Theepitaxial silicon layer is thinned down to less than 3um. The sensor is tested andcharacterized at 5nm to 30nm illumination. At 17.4nm targeted wavelength, thedetector external QE (exclude quantum yield factor) reaches almost 60%. Thedetector reaches read noise of 1.2 ph- (@17.4nm), i.e. close to performance of EUVphoton counting." @default.
- W1995422915 created "2016-06-24" @default.
- W1995422915 creator A5001451095 @default.
- W1995422915 creator A5031335232 @default.
- W1995422915 creator A5035134691 @default.
- W1995422915 creator A5052363096 @default.
- W1995422915 creator A5072472885 @default.
- W1995422915 date "2012-02-09" @default.
- W1995422915 modified "2023-09-27" @default.
- W1995422915 title "A high-dynamic range (HDR) back-side illuminated (BSI) CMOS image sensor for extreme UV detection" @default.
- W1995422915 doi "https://doi.org/10.1117/12.906617" @default.
- W1995422915 hasPublicationYear "2012" @default.
- W1995422915 type Work @default.
- W1995422915 sameAs 1995422915 @default.
- W1995422915 citedByCount "7" @default.
- W1995422915 countsByYear W19954229152013 @default.
- W1995422915 countsByYear W19954229152014 @default.
- W1995422915 countsByYear W19954229152022 @default.
- W1995422915 crossrefType "proceedings-article" @default.
- W1995422915 hasAuthorship W1995422915A5001451095 @default.
- W1995422915 hasAuthorship W1995422915A5031335232 @default.
- W1995422915 hasAuthorship W1995422915A5035134691 @default.
- W1995422915 hasAuthorship W1995422915A5052363096 @default.
- W1995422915 hasAuthorship W1995422915A5072472885 @default.
- W1995422915 hasConcept C120665830 @default.
- W1995422915 hasConcept C121332964 @default.
- W1995422915 hasConcept C154945302 @default.
- W1995422915 hasConcept C155512908 @default.
- W1995422915 hasConcept C192562407 @default.
- W1995422915 hasConcept C2776179129 @default.
- W1995422915 hasConcept C2780056265 @default.
- W1995422915 hasConcept C31972630 @default.
- W1995422915 hasConcept C41008148 @default.
- W1995422915 hasConcept C46362747 @default.
- W1995422915 hasConcept C49040817 @default.
- W1995422915 hasConcept C76935873 @default.
- W1995422915 hasConcept C87133666 @default.
- W1995422915 hasConceptScore W1995422915C120665830 @default.
- W1995422915 hasConceptScore W1995422915C121332964 @default.
- W1995422915 hasConceptScore W1995422915C154945302 @default.
- W1995422915 hasConceptScore W1995422915C155512908 @default.
- W1995422915 hasConceptScore W1995422915C192562407 @default.
- W1995422915 hasConceptScore W1995422915C2776179129 @default.
- W1995422915 hasConceptScore W1995422915C2780056265 @default.
- W1995422915 hasConceptScore W1995422915C31972630 @default.
- W1995422915 hasConceptScore W1995422915C41008148 @default.
- W1995422915 hasConceptScore W1995422915C46362747 @default.
- W1995422915 hasConceptScore W1995422915C49040817 @default.
- W1995422915 hasConceptScore W1995422915C76935873 @default.
- W1995422915 hasConceptScore W1995422915C87133666 @default.
- W1995422915 hasLocation W19954229151 @default.
- W1995422915 hasOpenAccess W1995422915 @default.
- W1995422915 hasPrimaryLocation W19954229151 @default.
- W1995422915 hasRelatedWork W1964621136 @default.
- W1995422915 hasRelatedWork W2003288382 @default.
- W1995422915 hasRelatedWork W2028348614 @default.
- W1995422915 hasRelatedWork W2108047684 @default.
- W1995422915 hasRelatedWork W2132014979 @default.
- W1995422915 hasRelatedWork W2143589838 @default.
- W1995422915 hasRelatedWork W2144472481 @default.
- W1995422915 hasRelatedWork W2160828022 @default.
- W1995422915 hasRelatedWork W2562583481 @default.
- W1995422915 hasRelatedWork W2995582362 @default.
- W1995422915 isParatext "false" @default.
- W1995422915 isRetracted "false" @default.
- W1995422915 magId "1995422915" @default.
- W1995422915 workType "article" @default.