Matches in SemOpenAlex for { <https://semopenalex.org/work/W1995487057> ?p ?o ?g. }
Showing items 1 to 69 of
69
with 100 items per page.
- W1995487057 abstract "The mechanical probing system is often one of the limiting factors in the calibration of length standards. It has been shown, that for highly accurate applications a particular effect, which is often not considered, has to be taken into account: a spherical probe on a stylus undergoes a small rotation due to the angular stylus deflection, which creates friction and potentially stick slip during the probing process and may thus lead to non-reproducible probing. A novel probe has been built which avoids this effect by an additional degree of freedom, providing a small vertical movement of the stylus. The probe is of a monolithic flexure hinge design with a ridge connection of the stylus and the mirror reflector for the plane mirror interferometer, which measures the displacement. Them measurement force, which is proportional to the deflection of the hinges, is measured with a capacitive probe. The probing procedure generates the force/deflection curve and allows for the measurement force to be extrapolated to zero. The presented test results show the system's capability for a probing accuracy in the nanometer range." @default.
- W1995487057 created "2016-06-24" @default.
- W1995487057 creator A5022421649 @default.
- W1995487057 creator A5033499749 @default.
- W1995487057 creator A5059279179 @default.
- W1995487057 creator A5075975307 @default.
- W1995487057 date "2001-10-22" @default.
- W1995487057 modified "2023-10-14" @default.
- W1995487057 title "Novel design of a one-dimensional measurement probe" @default.
- W1995487057 doi "https://doi.org/10.1117/12.445617" @default.
- W1995487057 hasPublicationYear "2001" @default.
- W1995487057 type Work @default.
- W1995487057 sameAs 1995487057 @default.
- W1995487057 citedByCount "1" @default.
- W1995487057 countsByYear W19954870572016 @default.
- W1995487057 crossrefType "proceedings-article" @default.
- W1995487057 hasAuthorship W1995487057A5022421649 @default.
- W1995487057 hasAuthorship W1995487057A5033499749 @default.
- W1995487057 hasAuthorship W1995487057A5059279179 @default.
- W1995487057 hasAuthorship W1995487057A5075975307 @default.
- W1995487057 hasBestOaLocation W19954870572 @default.
- W1995487057 hasConcept C111919701 @default.
- W1995487057 hasConcept C120665830 @default.
- W1995487057 hasConcept C121332964 @default.
- W1995487057 hasConcept C154945302 @default.
- W1995487057 hasConcept C164086593 @default.
- W1995487057 hasConcept C166689943 @default.
- W1995487057 hasConcept C172707124 @default.
- W1995487057 hasConcept C192562407 @default.
- W1995487057 hasConcept C206755178 @default.
- W1995487057 hasConcept C23576306 @default.
- W1995487057 hasConcept C24890656 @default.
- W1995487057 hasConcept C2781355719 @default.
- W1995487057 hasConcept C41008148 @default.
- W1995487057 hasConcept C44000306 @default.
- W1995487057 hasConcept C74650414 @default.
- W1995487057 hasConceptScore W1995487057C111919701 @default.
- W1995487057 hasConceptScore W1995487057C120665830 @default.
- W1995487057 hasConceptScore W1995487057C121332964 @default.
- W1995487057 hasConceptScore W1995487057C154945302 @default.
- W1995487057 hasConceptScore W1995487057C164086593 @default.
- W1995487057 hasConceptScore W1995487057C166689943 @default.
- W1995487057 hasConceptScore W1995487057C172707124 @default.
- W1995487057 hasConceptScore W1995487057C192562407 @default.
- W1995487057 hasConceptScore W1995487057C206755178 @default.
- W1995487057 hasConceptScore W1995487057C23576306 @default.
- W1995487057 hasConceptScore W1995487057C24890656 @default.
- W1995487057 hasConceptScore W1995487057C2781355719 @default.
- W1995487057 hasConceptScore W1995487057C41008148 @default.
- W1995487057 hasConceptScore W1995487057C44000306 @default.
- W1995487057 hasConceptScore W1995487057C74650414 @default.
- W1995487057 hasLocation W19954870571 @default.
- W1995487057 hasLocation W19954870572 @default.
- W1995487057 hasOpenAccess W1995487057 @default.
- W1995487057 hasPrimaryLocation W19954870571 @default.
- W1995487057 hasRelatedWork W1514950410 @default.
- W1995487057 hasRelatedWork W2029552195 @default.
- W1995487057 hasRelatedWork W2047065129 @default.
- W1995487057 hasRelatedWork W2072361192 @default.
- W1995487057 hasRelatedWork W2076571966 @default.
- W1995487057 hasRelatedWork W2365121631 @default.
- W1995487057 hasRelatedWork W2401480642 @default.
- W1995487057 hasRelatedWork W2499398221 @default.
- W1995487057 hasRelatedWork W3022681545 @default.
- W1995487057 hasRelatedWork W4310506326 @default.
- W1995487057 isParatext "false" @default.
- W1995487057 isRetracted "false" @default.
- W1995487057 magId "1995487057" @default.
- W1995487057 workType "article" @default.