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- W1995496700 abstract "Investigations on the nature and states of the defects in single crystal wafers treated with double-gettering technique have been carried out by means of optical microscopy, electron microscopy, electron microanalysis and spread resistance. Phosphorus profile in these wafers was measured. And the effect of phosphorus on defects and resistivity was determined." @default.
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- W1995496700 date "1986-03-01" @default.
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- W1995496700 title "The study on defects in single crystal silicon wafers treated with double-Gettering technique" @default.
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- W1995496700 doi "https://doi.org/10.1088/0256-307x/3/3/005" @default.
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